飞秒激光掠入射抛光YSZ涂层机理研究  

Mechanism of Femtosecond Laser Polishing of YSZ Coating Under Grazing Incidence

作　　者：王梁 吴函齐[1,2,3] 于真鹤 韩宜 王亚星 王云鹏 张盼盼 姚建华[1,2,3] Wang Liang;Wu Hanqi;Yu Zhenhe;Han Yi;Wang Yaxing;Wang Yunpeng;Zhang Panpan;Yao Jianhua(Institute of Laser Advanced Manufacturing,Zhejiang University of Technology,Hangzhou 310023,Zhejiang,China;Ministry of Education/Zhejiang Provincial Key Laboratory of Special Equipment Manufacturing and Advanced Processing Technology,Hangzhou 310015,Zhejiang,China;College of Mechanical Engineering,Zhejiang University of Technology,Hangzhou 310023,Zhejiang,China;AECC Shenyang Liming Aero-Engine Co.,Ltd.,Shenyang 110043,Liaoning,China)

机构地区：[1]浙江工业大学激光先进制造研究院,浙江杭州310023 [2]特种装备制造与先进加工技术教育部/浙江省重点实验室,浙江杭州310015 [3]浙江工业大学机械工程学院,浙江杭州310023 [4]中国航发沈阳黎明航空发动机有限责任公司,辽宁沈阳110043

出　　处：《中国激光》2024年第24期117-126,共10页Chinese Journal of Lasers

基　　金：国家自然科学基金(52105311);省“尖兵”研发攻关计划(2023C01052);省“领雁”研发攻关计划(2024C01178)。

摘　　要：为降低氧化钇稳定氧化锆(YSZ)热障涂层的粗糙度以提升其在高温强气流环境下的使用性能,采用激光束与涂层近平行的掠入射烧蚀方法,对YSZ热障涂层进行了飞秒激光抛光,研究了激光抛光YSZ涂层表面粗糙度的变化规律,通过共聚焦显微镜观察了抛光表面形貌并对其进行了频谱分析,讨论了掠入射激光与材料表面的作用机理。结果表明:在相同的脉冲能量和频率下,光斑搭接率为20%时表面形貌最平整,粗糙度(形貌的算术平均偏差,Sa)最低(0.66μm),较原始表面下降了93.9%。在掠入射抛光过程中,当搭接率较低时,每个光斑的能量都能够被有效吸收和利用,从而获得平坦的烧蚀区域,而在较高搭接率的情况下,激光烧蚀区域的累积重叠效应容易导致周期与光斑直径一致的脊状波纹结构,这种结构不利于表面粗糙度的降低。进行了抛光处理,研究了不同抛光工艺下涂层的表面粗糙度,分析了抛光后的表面形貌及轮廓的频谱特征,初步获得了掠入射激光抛光YSZ涂层的机理,为硬脆类涂层的高质量激光抛光提供了思路。Objective Yttria-stabilized zirconia(YSZ)thermal barrier coatings have been widely used in the manufacturing of aircraft engines.Reducing the surface roughness of YSZ thermal barrier coatings can significantly improve the aerodynamic performance of materials,reduce stress concentration,and enhance service life of the coatings.This study proposes a grazing incidence laser polishing method to reduce the roughness of YSZ coatings.A femtosecond pulse laser is employed to perform grazing incidence polishing on YSZ coatings to investigate the material removal mechanism,solve the technical problems in the grazing incidence polishing,and expand the laser processing system.The preliminary mechanism of grazing incidence polishing on YSZ coatings is identified,offering valuable insights for the grazing incidence polishing and processing of YSZ thermal barrier coatings.Methods In this study,YSZ is coated on a 316L substrate using atmospheric plasma spraying(APS)equipment,and grazing incidence laser polishing is performed using a femtosecond laser at different overlap rates.A laser confocal microscope and scanning electron microscope(SEM)are used to observe the surface morphology after polishing.Fourier transform is conducted to analyze the spectrum of the polished surface profile,which contributes to the discovery of the mechanism of grazing incidence laser polishing and material surface ablation.Results and Discussions The key factor affecting the polishing results under the grazing incidence is the overlap rate of the laser spot.When all other factors remain unchanged,the surface roughness(Sa)after polishing initially decreases and then increases with increasing overlap rate,reaching its lowest value,0.66μm,when the overlap rate is 20%[Fig.5(c)].At both higher and lower overlap rates,a significant ridge-like structure appears at the bottom of the polishing area,indicating that polishing will be affected irrespective of the overlap rates.After conducting profile and spectrum analysis on the polished surface,it is concluded

关 键 词：YSZ热障涂层 飞秒激光 掠入射抛光 表面粗糙度 轮廓频谱 

分 类 号：TN249[电子电信—物理电子学]