基于二维预制结构阵列的金属表面LIPSS调控机理研究  

Mechanism of LIPSS Control on Metal Surfaces Based on Two-Dimensional Prefabricated Structure Arrays

作　　者：刘延硕 程勇兵 韩冰 张静 戴晗 王仁杰 Liu Yanshuo;Cheng Yongbing;Han Bing;Zhang Jing;Dai Han;Wang Renjie(School of Electronic and Optical Engineering,Nanjing University of Science and Technology,Nanjing 210094,Jiangsu,China)

机构地区：[1]南京理工大学电子工程与光电技术学院,江苏南京210094

出　　处：《中国激光》2024年第24期230-244,共15页Chinese Journal of Lasers

基　　金：国家自然科学基金(62275123)。

摘　　要：研究了激光在具有预制结构的铁材料表面诱导周期性结构的过程,并研究了传播性表面等离激元(SPP)干涉产生的能量周期性分布在这个过程中的作用。利用有限差分时域方法,模拟了激光入射具有光栅结构、长方体阵列结构以及四棱锥阵列结构的铁材料表面时的电磁场分布情况,讨论了预制结构的周期、高度和形状等参数对材料表面能量分布的影响。当预制结构满足SPP干涉增强条件时,材料表面会出现能量较大的周期性电磁场能量分布,进而产生激光诱导表面周期性结构(LIPSS)。研究成果可以为金属材料激光微纳加工提供一定的指导。Objective We study the process of laser-induced periodic structures on the surfaces of iron materials with prefabricated structures and investigate the role of the periodic energy distribution generated by surface plasmon polariton(SPP)interference in this process.The finite difference time domain method is used to simulate the electromagnetic field distributions on the surfaces of iron materials with gratings,rectangular arrays,and pyramid array structures when the laser is incident.The influences of parameters such as the period,height,and shape of the prefabricated structure on the energy distribution on the material surface are discussed.When the prefabricated structure satisfies the SPP interference enhancement condition,a strong periodic electromagnetic field energy distribution appears on the material surface,resulting in laser-induced periodic surface structures(LIPSS).The results of this study can provide theoretical guidance for the laser micro/nano processing of metal materials.Methods The finite time difference method is used to study the influence of prefabricated structures on the LIPSS,and models of grating structures,rectangular array structures,and pyramid array structures are established for the simulation.The influence of surface-prefabricated structures on the distributions of electromagnetic fields on the material surfaces as well as the regulation of LIPSS is also studied.Simultaneously,the evolution process of LIPSS is also simulated.Results and Discussions A series of electric dipoles on the surfaces of metal materials can achieve the directional coupling of surface plasmon polarons and thereby generate plane waves.In the previous section,the simulated prefabricated structure array plays a role similar to that of an electric dipole array.When the laser is incident on a column of prefabricated structures perpendicular to the direction of laser polarization,coupling occurs between the SPPs excited by each structure,thereby resulting in plane waves propagating along the direction of laser pol

关 键 词：激光诱导周期性表面结构 表面等离激元 预制结构 电磁场能量分布 

分 类 号：TN249[电子电信—物理电子学]