基于PDMS锥形微结构的柔性石墨烯压力传感器  

Flexible Graphene Pressure Sensor Based on PDMS with Conical Microstructure

作　　者：张珈铭 李雷[1] 宋阳 徐荣青[1] 赵江[2] ZHANG Jiaming;LI Lei;SONG Yang;XU Rongqing;ZHAO Jiang(College of Electronic and Optical Engineering,College of Flexible Electronics(Future Technology),Nanjing University of Posts and Telecommunications,Nanjing,210023,CHN;College of Integrated Circuit Science and Engineering,Nanjing University of Posts and Telecommunications,Nanjing,210023,CHN)

机构地区：[1]南京邮电大学电子与光学工程学院、柔性电子(未来技术)学院,南京210023 [2]南京邮电大学集成电路科学与工程学院,南京210023

出　　处：《固体电子学研究与进展》2025年第1期87-93,共7页Research & Progress of SSE

基　　金：江苏省自然科学基金面上项目(BK20231229)。

摘　　要：为解决压力传感器中的高灵敏度和宽传感范围的平衡问题,受日常应用中光敏印章技术的启发,采用光敏印章辅助掩模技术制作基于聚二甲基硅氧烷(Polydimethylsiloxane,PDMS)锥形微结构的石墨烯压力传感器,并且研究了不同圆锥尺寸对压力传感器灵敏度的影响。结果表明,PDMS锥形结构的圆锥半径为1.5 mm时可有效提高灵敏度,双层PDMS锥形微结构的石墨烯压力传感器在0~0.5 kPa的工作范围时,灵敏度可达0.082 7 kPa^(-1);工作范围为0.5~3.0 kPa时,灵敏度为0.293 6 kPa^(-1),是目前相同种类、相同结构材料灵敏度的2.4倍。该双层PDMS锥形压力传感器具有62.5 ms的响应时间,125 ms的恢复时间,并呈现优异的重现性,适用于医疗保健、可穿戴电子、智能包装等领域。To solve the balance problem of high sensitivity and wide sensing range in pressure sensor,a pressure sensor based on polydimethylsiloxane(PDMS)conical microstructures with gra-phene was developed using a photoresist assisted masking technique,inspired by the photo-stamping technology.The influence of different cone sizes on the sensitivity of pressure sensor was also studied.The results show that the cone radius of 1.5 mm can effectively improve the sensitivity.The sensi-tivity of the dual-layer PDMS conical microstructure-based graphene pressure sensor ranges from 0.0827 kPa^(-1) at 0-0.5 kPa to 0.2936 kPa^(-1) at 0.5-3.0 kPa.The sensitivity of the dual-layer cone struc-ture being approximately 2.4 times that of the same material and structure.With a response time of 62.5 ms,a recovery time of 125 ms and excellent reproducibility,the double-layer PDMS conical pressure sensor is suitable for healthcare,wearable electronics,smart packaging and other fields.

关 键 词：激光诱导石墨烯 光敏垫 激光雕刻 微锥结构 电容式压力传感器 

分 类 号：TN432[电子电信—微电子学与固体电子学]