基于椭偏光谱和光杠杆法的薄膜厚度及曲率测量系统设计  

Design of film thickness and curvature measurement system based on ellipsometry spectrum and optical lever method

作　　者：孙伟 金尚忠 张殷 孙紫娟 徐胜 SUN Wei;JIN Shangzhong;ZHANG Yin;SUN Zijuan;XU Sheng(College of Optical and electronic technology,China Jiliang University,Hangzhou 310018,China;Suzhou Peaktra Technology Co.,Ltd.,Suzhou Jiangsu 215004,China)

机构地区：[1]中国计量大学光学与电子科技学院,杭州310018 [2]苏州岚创科技有限公司,江苏苏州215004

出　　处：《光通信技术》2025年第1期94-100,共7页Optical Communication Technology

摘　　要：在密集波分复用系统中使用窄带滤光片进行工艺调试时,需要对单层薄膜的厚度、厚度分布以及残余应力等参数进行测量。针对当前需采用多个系统测量时的复杂性及重复定位而引入误差的问题,设计了一种基于椭偏光谱和光杠杆法的薄膜厚度及曲率测量系统。该系统在椭偏光谱测量的基础上引入光杠杆法,成功地在一个集成设备上实现了对上述多种参数的精确测量。实验结果表明:与RC2型椭偏仪、ZYGO激光干涉仪测量结果相比,所设计的测量系统测得的薄膜厚度偏差小于0.21%,厚度分布偏差值小于0.025%,曲率和残余应力偏差均在±1°以内,系统能够统满足实际的测量需求。In the dense wavelength division multiplexing system,when adjusting the process using a narrowband filter,it is necessary to measure the thickness,thickness distribution,and residual stress of a single layer of film.To solve the complexity and repeated positioning errors introduced by the need to use multiple systems for measurement,a measurement system based on ellipsometry spectrum and the optical lever method is introduced,which successfully achieved precise measurement of these parameters on a single integrated device.The experimental results show that the thickness deviation measured by the designed measurement system is less than 0.21%,the thickness distribution deviation is less than 0.025%,the curvature and the residual stress deviation is within±1°.The system can meet the actual measurement needs.

关 键 词：光学检测 椭偏光谱 光杠杆法 基片曲率法 残余应力 

分 类 号：TN256[电子电信—物理电子学]