运放失调电压的激光修调测试  

Laser trimming testing of operational amplifier offset voltage

作　　者：李灿 程法勇 郭晓宇[1] 王建超[1] 韩先虎 LI Can;CHENG Fayong;GUO Xiaoyu;WANG Jianchao;HAN Xianhu(The 58th Research Institute,CETC,Wuxi 214035,China)

机构地区：[1]中国电子科技集团公司第五十八研究所,江苏无锡214035

出　　处：《现代电子技术》2025年第6期113-117,共5页Modern Electronics Technique

摘　　要：目前高精度运算放大器的应用愈发普及,由于集成电路制造工艺的限制,运算放大器的输入级晶体管和负载电阻无法做到完全匹配,因此需要通过修调方式提高运放输入级的匹配度,以此减小失调电压。文中介绍了运放失调电压的定义和产生的原因,分析了失调电压的测试方法,并对常用的失调电压修调方法进行了介绍和对比,总结了激光修调的优点。然后分析失调电压激光修调的原理,同时基于激光修调常用的几种切割方式,选择帽型电阻双线切割方式。为了达到更高的精度和良品率,提出了一种在线激光修调方法,最终通过测试数据对比分析,验证了在线激光修调的优越性。The application of high-precision operational amplifiers is becoming popular increasingly.Due to the limitations of integrated circuit manufacturing technology,the input transistor and load resistance of operational amplifiers cannot be matched completely.Therefore,it is necessary to improve the matching degree of the input stage of the operational amplifier by means of trimming methods to reduce the offset voltage.The definition and the causes of operational amplifier offset voltage are introduced,and the testing methods for offset voltage are analyzed.The commonly used offset voltage trimming methods are introduced and compared,and the advantages of laser trimming are summarized.The principle of laser trimming of offset voltage is analyzed,and based on several commonly used cutting methods for laser trimming,the hat-type resistor dual wire cutting method is selected.In order to realize higher accuracy and yield,a method for online laser trimming was proposed.The superiority of online laser trimming was verified by means of comparative analysis of testing data.

关 键 词：运算放大器 失调电压 激光修调 自动测试系统 集成电路 制造工艺 

分 类 号：TN247-34[电子电信—物理电子学]