基于MASS离子传输系统的仿真研究  

Simulation Study Based on MASS Ion Transport System

作　　者：郭金泉 蔡树向 高浩 李飞 杨文广 GUO Jinquan;CAI Shuxiang;GAO Hao;LI Fei;YANG Wenguang(School of Electromechanical and Automotive Engineering,Yantai University,Yantai 264005,China)

机构地区：[1]烟台大学机电汽车工程学院,山东烟台264005

出　　处：《烟台大学学报(自然科学与工程版)》2025年第1期118-124,共7页Journal of Yantai University(Natural Science and Engineering Edition)

基　　金：国家自然科学基金资助项目(62273289)。

摘　　要：对电感耦合等离子体传输过程中的多项指标进行分析,对比不同离子透镜的设计方法,从而确定离子传输系统的通路设计。在COMSOL Mutiphysics软件中对传输过程进行仿真,利用显示的离子路径以及传输效率、离子动能等多项指标对传输系统各部件进行位置以及机械尺寸的调整。相对于传统方式,此传输系统离子损耗较低且背景噪音小,实现了离子在传输过程中的90°偏转。By analyzing multiple indicators in the inductively coupled plasma transport process,and comparing the design methods of different ion lenses,the path design of the ion transport system is determined.The transmission process in the COMSOL Mutiphysics software is simulated,the position and mechanical dimensions of each component of the transmission system are adjusted by using the displayed ion path,transmission efficiency,ion kinetic energy and so on.Compared with traditional methods,this transport system has low ion loss and low background noise,and realizes 90°deflection of ions during transmission.

关 键 词：离子传输 COMSOL仿真 ICP-MS 电感耦合等离子体 

分 类 号：TH843[机械工程—仪器科学与技术]