并联式三维扫描测头结构设计与性能分析  

Design and Performance Analysis of Parallel 3D Scanning Probe Structure

作　　者：魏晓宇 王建华[1] 姜冰清[1] Wei Xiaoyu;Wang Jianhua;Jiang Bingqing(School of Mechanical and Electrical Engineering,Xi'an Technological University,Xi'an 710021,China;不详)

机构地区：[1]西安工业大学机电工程学院,西安市710021

出　　处：《工具技术》2025年第1期142-146,共5页Tool Engineering

基　　金：陕西省“智能制造”科技重大专项(2019zdzx01-02-02)。

摘　　要：三维扫描测头广泛应用于精密测量领域,其主要是串联式结构,该结构的每个方向运动件质量不同,难以实现三向同性,影响测量精度。通过分析三维扫描测头的功能框图和运动简图,设计一种新型并联式三维扫描测头,选用“平行簧片和弹性杆”组合结构作为导向机构,解决了三个测量方向运动质量不一致、刚度不相等的问题。通过仿真分析验证表明,该结构三个方向运动质量和刚度可以达到一致,对测头样机进行实测标定,新设计的三维扫描测头达到了设计要求。Three-dimensional scanning probes are extensively employed in precision measurement.The 3D scanning probe predominantly adopts a series structure,which encounters challenges in achieving isotropy due to disparities in the quality of moving parts along different axes,consequently impacting measurement accuracy.Following an analysis of the functional block diagram and motion diagram of the 3D scanning probe,a novel parallel 3D scanning probe is devised.The“parallel reed and elastic rod”combination structure serves as the guiding mechanism to address issues related to inconsistent motion mass and unequal stiffness across the three measuring directions.Simulation analysis demonstrates that this structure can achieve uniform motion mass and stiffness in all three directions.Experimental results validate that the newly designed 3D scanning probe meets design requirements.

关 键 词：三维扫描测头 三向同性 结构设计 仿真分析 样机实验 

分 类 号：TG803[金属学及工艺—公差测量技术]