用于苯系物快速分离的微型气相色谱柱  

Micro Gas Chromatography Column for Rapid BTEX Separatio

作　　者：李文博 祝雨晨 李之睿 马少杰 曾睿 赵斌 冯飞[1] Li Wenbo;Zhu Yuchen;Li Zhirui;Ma Shaojie;Zeng Rui;Zhao Bin;Feng Fei(State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China;College of Intelligent Medicine,Chengdu University of Traditional Chinese Medicine,Chengdu 610075,China)

机构地区：[1]中国科学院上海微系统与信息技术研究所传感技术国家重点实验室,上海200050 [2]成都中医药大学智能医学学院,成都610075

出　　处：《半导体技术》2025年第3期248-253,共6页Semiconductor Technology

基　　金：新一代人工智能国家科技重大专项(2018AAA0103100);上海科技创新行动计划医学创新研究专项(22Y11900600)。

摘　　要：苯、甲苯、乙苯和二甲苯等苯系物(BTEX)因化学性质相似、分子结构相近,通常难以快速分离。基于微电子机械系统(MEMS)技术研制了一种以SE-54为固定相的含有高密度椭圆柱阵列的微型气相色谱柱(μGCC),该μGCC表面积大、深宽比高。研究结果表明,所研制的μGCC最快能在55 s内分离苯、甲苯、对二甲苯和邻二甲苯这四种苯系物,且四种苯系物的分离度均大于1.5,实现了对苯系物的快速基线分离,且柱前压仅为8.71 psi(1 psi≈6.895 kPa),有利于将其应用于便携式气相色谱系统。该μGCC有望在苯系物现场实时检测领域获得广泛应用。Benzene,toluene,ethylbenzene and xylene(BTEX)areusually difficultto separate quickly because of their similar chemical properties and molecular structures.Based on the micro electro-mechanical system(MEMS)technology,a micro gas chromatography column(μGCC)with high-density elliptic cylindrical post array using SE-54 as stationary phase was developed.TheμGCC has a large sur-face area and a high aspect ratio.The research results show that the developedμGCC can separate four BTEXs(benzene,toluene,p-xylene and o-xylene)in 55 s at the fastest,and the resolutions of four BTEXs are all over 1.5,achieving a rapid baseline separation of the BTEX.The intel pressure of only 8.71 psi(1 psi~6.895 kPa)is helpful for its application in mobile gas chromatography systems.TheμGCC is expected to be widely used in the field of on-site real-time BTEX detection.

关 键 词：微型气相色谱柱(μGCC) 高密度椭圆柱阵列 快速分离 苯系物(BTEX) 微电子机械系统(MEMS) 

分 类 号：TN389[电子电信—物理电子学]