不同工况下同轴电容位置控制误差对微小力输出影响研究  

Investigation of the Influence of Coaxial Capacitance PositionControl Error on Micro Force Output under Different Working Conditions

作　　者：邹韶明 谢闰根[2] ZOU Shaoming;XIE rungen(Institute of Mechanical and Electrical Engineering,Anqing Vocational&Technical College,Anqing Anhui 246003,China;Journal Editorial Department,Nanchang Normal University,Nanchang Jiangxi 330032,China)

机构地区：[1]安庆职业技术学院机电工程学院,安徽安庆246003 [2]南昌师范学院学报编辑部,江西南昌330032

出　　处：《萍乡学院学报》2024年第6期29-33,共5页Journal of Pingxiang University

基　　金：安庆市2021年科技计划项目“智能制造工程协同研发中心”(2021Z0005);安徽省教育厅质量工程项目“智能制造虚拟仿真实训基地”(2023fzsx022)。

摘　　要：同轴电容是微小力测量中的关键核心部件,对微小力测量结果的准确性具有重要影响。研究采用有限元分析的方法对不同工况下同轴电容位置控制误差与微小力输出之间的关系进行分析,得出不同工况、不同位置控制误差下,同轴电容装置输出微小力相对于标准值的偏离程度。结果表明:在相交长度为40 mm、30 mm和0 mm的工况时,内电极位置控制误差对微小力输出结果影响非常明显;而相交长度为20 mm、10 mm的工况下,内电极位置控制误差导致的微小力输出误差较小,该工况适合微小力测量装置使用,特别是相交长度为20 mm的工况下,内电极位置控制误差导致的微小力输出误差极小。分析结果对于优化微小力测量装置结构、提升装置测量准确度均具有重要意义。As a key core component of microforce measurement,coaxial capatitance has an important influence on the accuracy of the measurement results.The relationship between the position control error of coaxial capacitance and the micro force output under different working conditions was investigated by finite element analysis method.The deviation of the micro force output relative to the standard value under different working conditions and different position control errors was compared and analyzed.The results shown that the internal electrode position control error had a significant effect on the micro force output at the condition of intersection length were 40mm,30mm and 0mm.At the condition of intersection length were 20mm or 10mm,the micro force output error caused by the internal electrode position control error was small,which was suitable for the micro force measurement device.The results were of great significance for optimizing the micro force measuring device and improving the measuring accuracy of the device.

关 键 词：微小力 同轴电容 内电极 位置控制误差 

分 类 号：TG83[金属学及工艺—公差测量技术]