Ag/Al_(2)O_(3)/ZnO复合膜的长波段可见光增强研究  

Enhancement of long wavelength visible light in Ag/Al_(2)O_(3)/ZnO composite films

作　　者：殷财旺 陈海霞[1] 丁继军[1] 刘紫阳 YIN Caiwang;CHEN Haixia;DING Jijun;LIU Ziyang(Shaanxi Key Laboratory of Measurement and Control Technology for Oil and Gas Wells,School of Science,Xi'an Shiyou University,Xi'an 710065,China)

机构地区：[1]西安石油大学理学院,陕西省油气井测控技术重点实验室,西安710065

出　　处：《功能材料》2025年第2期2214-2218,共5页Journal of Functional Materials

基　　金：国家自然科学基金(11804273);陕西省自然科学基金(2024JC-YBMS-060);陕西省科技攻关计划(2019GY-170);西安石油大学研究生创新与实践能力培养计划项目(YCS22111036)。

摘　　要：结合磁控溅射技术和等离子刻蚀在p型Si上制备了ZnO,Ag/ZnO和Ag/Al_(2)O_(3)/ZnO复合薄膜,并在高真空环境中进行退火处理,表面形貌、晶体结构和光致发光谱被表征。实验结果表明,溅射的Ag薄膜经过250℃真空退火和等离子刻蚀后,形成尺寸规则的Ag纳米颗粒,引入Ag和Al_(2)O_(3)之后,ZnO(002)衍射峰的半峰全宽增大,结晶质量下降。Ag/ZnO薄膜在可见区的发光中心被移动到645 nm处,可见光与紫外光强度之比被增加到17.34。同时,Al_(2)O_(3)介质层对ZnO荧光发射具有调制作用,当Al_(2)O_(3)溅射时间为5 min时,Ag/Al_(2)O_(3)/ZnO复合膜在685 nm处出现了最强的发射带,可见光与紫外光强度之比高达78.29,且峰位向长波方向红移40 nm,当间隔层的厚度继续增加时,可见区发射强度反而降低,相应的荧光增强机制被讨论。ZnO,Ag/ZnO and Ag/Al_(2)O_(3)/ZnO composite films are prepared on p-type Si by combining magnetron sputtering technique and plasma etching,and annealed in high vacuum environment.The surface morphologies,crystal structures and photoluminescence spectra are characterized.The experimental results show that Ag nanoparticles with regular sizes are formed after vacuum annealing at 250℃and plasma etching.At the same time,after the introduction of Ag and Al_(2)O_(3),the full width at half maximum of the ZnO(002)diffraction peak increases and the crystal quality decreases.The luminescent center of Ag/ZnO thin films in the visible region is shifted to 645 nm,and the intensity ratio of visible to ultraviolet light is increased to 17.34.Meanwhile,the Al_(2)O_(3)interlayer has a modulating effect on the fluorescence emission of ZnO.When the Al_(2)O_(3)sputtering time is 5 min,Ag/Al_(2)O_(3)/ZnO composite films exhibit the strongest emission band at 685 nm,with a visible to ultraviolet intensity ratio of up to 78.29,and the peak position is red shifted towards the long wavelength direction by 40 nm.As the thickness of the interlayer is further increased,the visible emission intensity is actually decreased,and the corresponding fluorescence enhancement mechanism is discussed.

关 键 词：ZNO 贵金属 介质层 光致发光 荧光增强机制 

分 类 号：O484.4[理学—固体物理]