三氟化氮精馏分离流程的设计与控制  

Design and control of nitrogen trifluoride distillation separation process

作　　者：孟祥军 杨林睿 彭立培 杨献奎 花莹曦 张人仁 郑凯天 许春建[1] MENG Xiangjun;YANG Linrui;PENG Lipei;YANG Xiankui;HUA Yingxi;ZHANG Renren;ZHENG Kaitian;XU Chunjian(State Key Laboratory of Chemical Engineering,School of Chemical Engineering and Technology,Tianjin University,Tianjin 300072,China;Peric Special Gases Co.Ltd.,Handan 056002,Hebei,China)

机构地区：[1]天津大学化工学院化学工程联合国家重点实验室,天津300072 [2]中船(邯郸)派瑞特种气体股份有限公司,河北邯郸056002

出　　处：《化工学报》2025年第2期707-717,共11页CIESC Journal

基　　金：国家科技重大专项(013ZX02401);化学工程联合国家重点实验室自主研究课题(SKL-ChE-22T06)。

摘　　要：三氟化氮在集成电路制造的刻蚀和清洗工艺中起到关键作用,其产品纯度和纯度稳定性要求高,精馏过程能耗大。以三氟化氮精馏过程的节能和可控性为研究对象系统研究了三氟化氮精馏过程的分离序列、热集成和过程控制:在工业现有的顺式分离序列流程基础上提出反式分离序列流程、热集成顺式分离序列流程和热集成反式分离序列流程,模拟计算结果表明热集成反式分离序列流程为较优流程,在年处理量为120000 kmol的情况下与顺式分离序列流程相比年度总成本降低了96.4万元;对顺式分离序列流程和热集成反式分离序列流程进行了动态控制结构研究,结果表明提出的控制结构对进料流量和组成的干扰具有良好的控制性能。研究结果可为工业化的三氟化氮精馏过程的节能和控制提供参考。Nitrogen trifluoride plays a critical role in the etching and cleaning processes in integrated circuit fabrication.Its product purity and purity stability are high,and the energy consumption is high.Focusing on the energy efficiency and controllability of the nitrogen trifluoride distillation process,the separation sequences,thermal integration,and dynamic control of the process were systematically studied.Based on the existing industrial direct separation sequence process,the indirect separation sequence process,the heat-integrated direct separation sequence process,and the heat-integrated indirect separation sequence process were proposed.Simulation results indicate that the heat-integrated indirect separation sequence process is optimal,reducing the total annual cost by 96.4×104 CNY compared to the direct separation sequence process with an annual capacity of 120000 kmol.A dynamic control structure study for the direct separation sequence process and the heat-integrated indirect separation sequence process was conducted.The results show that the proposed control structures exhibit excellent control performance for disturbances in feed flow and composition.The findings provide reference on energy-saving and control strategies for the industrial nitrogen trifluoride distillation process.

关 键 词：精馏 纯化 分离 动态模拟 

分 类 号：TQ117[化学工程—无机化工] TQ028.1