两种不同形式原料粉体制备的ITO靶材特性的比较研究  

Comparative study of the characteristics of ITO targets prepared from two different forms of raw material powders

作　　者：耿智凡 朱归胜[1,2] 徐华蕊[1,2] GENG Zhifan;ZHU Guisheng;XU Huarui(Engineering Research Center of Ministry of Education for Electronic Information Materials and Devices,Guilin University of Electronic Technology,Guilin 541004,China;Guangxi Key Laboratory of Information Materials,Guilin University of Electronic Technology,Guilin 541004,China)

机构地区：[1]桂林电子科技大学电子信息材料与器件教育部工程研究中心,广西桂林541004 [2]桂林电子科技大学广西电子信息材料构效关系重点实验室,广西桂林541004

出　　处：《桂林电子科技大学学报》2024年第5期511-518,共8页Journal of Guilin University of Electronic Technology

基　　金：国家自然科学基金(U21A2065);广西科技重大专项(AA21077018,AB20297053);电子信息材料与器件工程研究中心(EIMD-AA202001);广西信息材料重点实验室基金(201002-Z)。

摘　　要：氧化铟锡(ITO)薄膜因其优异的性能,在显示设备、太阳能电池、气体传感器等中被广泛应用。溅射法制备优质ITO薄膜需要ITO靶材具有高纯度、高致密度、组织均匀和良好的导电性,选择何种原料粉末制备高质量的ITO靶材一直是一个备受争议的话题。为了获取高质量的ITO溅射靶材,分别采用氧化铟锡(ITO)粉体和氧化铟-氧化锡混合粉体为原料,以冷烧结-微波烧结的方式制得了相应的ITO靶材。通过对其相结构、微观形貌、致密度、导电性能及元素分布的分析,对比了2种不同粉体原料在相同的冷烧结-微波烧结条件下制备出的ITO靶材的性能。结果表明,以氧化铟-氧化锡混合粉体为原料制得的ITO靶材表现出更高的致密度、更好的电性能及更细小的晶粒,且以这2种不同形式的原料制得的靶材均呈现出均匀的组分分布。该工作有助于提高ITO靶材的质量,降低生产成本。Indium tin oxide(ITO)thin films are widely used in display devices,solar cells,gas sensors,etc,because of their excellent properties.The preparation of high-quality ITO thin films by sputtering requires ITO targets with high purity,high density,uniform organization and good electrical conductivity,and the choice of raw material powder to prepare high-quality ITO targets has been a highly controversial topic.To obtain high-quality ITO sputtering targets,this study used indium tin oxide(ITO)powder and indium oxide-tin oxide hybrid powder as raw materials to produce the corresponding ITO targets by cold sintering and microwave sintering.By analyzing the phase structure,microscopic morphology,density,conductivity and elemental distribution,the performance differences of the ITO targets prepared from the two different powders under the same cold sintering-microwave sintering conditions were compared.The results show that the ITO targets made from the indium oxide-tin oxide mixture exhibit higher densities,better electrical properties and finer grains.The targets made from the two different forms of raw materials show a uniform component distribution.The above results are in favor of improving the quality of ITO targets and reducing the production cost.

关 键 词：ITO靶材 水热ITO粉体 氧化铟 氧化锡混合粉末 冷烧结 微波烧结 

分 类 号：TB34[一般工业技术—材料科学与工程]