基于飞秒激光加工的环烯烃聚合物微通道制备与应用  

Fabrication and application of cyclicolefin polymer microchannels based on femtosecond laser processing

作　　者：武凯超 魏娟 孙明凯 王春雨 郑宏宇 WU Kaichao;WEI Juan;SUN Mingkai;WANG Chunyu;ZHENG Hongyu(School of Mechanical Engineering,Shandong University of Technology,Zibo 255000,China)

机构地区：[1]山东理工大学机械工程学院,山东淄博255000

出　　处：《工程塑料应用》2025年第2期65-72,共8页Engineering Plastics Application

基　　金：国家重点研发计划项目(2022YFB4600402,2022YFE0199100);山东省自然科学基金项目(ZR2021QE130,ZR2021QF007,ZR2021MF030);山东省泰山学者基金项目(tsqn202306192)。

摘　　要：环烯烃合物(COP)在微流控领域具有广阔的应用前景。研究了飞秒激光加工COP微通道的制备工艺。通过单脉冲烧蚀实验研究了COP的消融特性,并使用面积外推法将平均功率和对应的凹坑直径进行联立计算,最终确定激光光斑半径为4.47μm,COP烧蚀阈值为9.4J/cm^(2)。在5.3~7.2mW的激光平均功率范围内,探究了激光聚焦位置、激光扫描速度和激光扫描次数对COP微通道形貌与尺寸的影响。结果表明,在聚焦位置(-200~200)μm范围内0μm处的微通道深度最大,向两侧偏移时微通道深度逐渐减小,且200μm处微通道底部形貌完整性优于-200μm。激光扫描速度每增加0.025 mm/s,微通道深度减少10%;随着激光加工次数的增加,微通道深度增加,加工2次时深度增加约20%,加工3~6次时,每次深度约增加10%。此外,设计了一款可实现浓度混合的双螺旋结构微混合器,通过COMSOL6.2分析了混合时微通道不同位置截面的浓度混合状态,并通过热压法对芯片基板和盖板进行封合测试,结果表明微流控芯片混合器密封良好,无漏液现象。得到的实验参数和规律,能够为飞秒激光加工COP微通道提供技术支撑。Cyclic olefin polymers(COP)have broad applications in the field of microfluidics.The fabrication processes of COP microchannels using femtosecond laser processing were investigated.The ablation characteristics of COP were studied through single pulse ablation experiments,and the average power and corresponding pit diameter were simultaneously calculated using the area extrapolation method.The laser spot radius was finally determined to be 4.47μm,and the ablation threshold of COP was 9.4 J/cm^(2).The effects of laser focusing position,laser scanning speed,and laser scanning times on the morphology and size of COP micro‐channels were investigated within the average laser power range of 5.3-7.2 mW.The results show that within the range of(-200-200)μm of the focal position,the microchannel depth is the highest at 0μm,and gradually decrease as it shift towards both sides.Moreover,the integrity of the microchannel bottom morphology at 200μm is better than that at-200μm.For every 0.025 mm/s increase in laser scanning speed,the microchannel depth decreases by 10%.With the increase of laser processing times,the depth of microchannels increases.When processed twice,the depth increases by about 20%,and when processed 3-6 times,the depth increas‐es by about 10%each time.In addition,an equidistant spiral structure micro mixer was designed to achieve concentration mixing.The concentration mixing state of microchannels at different positions during mixing was analyzed using COMSOL6.2,and the sealing test of the chip substrate and cover plate was conducted using hot pressing method.The results show that the microfluidic chip mixer has good sealing and no leakage phenomenon.The experimental parameters and patterns obtained in this article can provide technical support for femtosecond laser processing of COP microchannels.

关 键 词：飞秒激光 环烯烃聚合物 微通道 混合器 双螺旋螺旋结构 

分 类 号：TN249[电子电信—物理电子学]