集成电路用超纯球形粉体的膜法提纯工艺  

Membrane Purification of Ultra-Pure Spherical Powder for Integrated Circuits

作　　者：阮建军 韩小妮 朱刚 吕福法 徐俊杰 徐华强 RUAN Jianjun;HAN Xiaoni;ZHU Gang;LYU Fufa;XU Junjie;XU Huaqiang(Jiangsu Novoray New Material Co.,Ltd.,Lianyungang Jiangsu 222000,China;Novoray New Material(Lianyungang)Co.,Ltd.,Lianyungang Jiangsu 222000,China)

机构地区：[1]江苏联瑞新材料股份有限公司,江苏连云港222000 [2]联瑞新材(连云港)有限公司,江苏连云港222000

出　　处：《当代化工》2025年第2期364-368,共5页Contemporary Chemical Industry

摘　　要：为提升集成电路用球形粉体生产提纯工艺水平,以配制的球形氧化铝洗涤水模拟溶液,研究利用过滤精度为20 nm的陶瓷膜错流过滤系统对球形氧化铝模拟溶液进行分离提纯处理。考察了球形氧化铝模拟料液提纯前后固相质量分数、浊度、电导率及pH变化数据;研究了不同规格球形氧化铝模拟料液对系统过滤通量的影响;分析了洗涤次数对球形氧化铝粉体中杂质离子(钠离子、氯离子)质量浓度变化趋势的影响。结果表明:提纯后的球形氧化铝粉体杂质金属离子含量降低,可有效提升集成电路用球形粉体材料的纯度。To improve the purification of spherical powders for integrated circuits,the spherical alumina simulated solution was purified by a ceramic membrane cross-flow filtration system with a filtration accuracy of 20 nm.The changes in solid mass fraction,turbidity,electrical conductivity,and pH of simulated alumina solution before and after purification were investigated;the influence of spherical alumina with different sizes on membrane flux was studied;the effect of washing times on the changing trend of impurity ion(sodium ion,chloride ion) mass concentration in spherical alumina powder was analyzed.The research results indicated that the impurity metal ion content in purified spherical alumina powder was reduced,which could effectively improve the purity of spherical powder materials for integrated circuits.

关 键 词：集成电路 超纯球形粉体 提纯 陶瓷膜 超滤 二氧化硅 氧化铝 

分 类 号：TQ127.2[化学工程—无机化工]