光纤准直非球面微透镜阵列模压成形  

Precision glass molding for fiber collimating aspherical microlens array

作　　者：高立恒 于谦 周天丰[1] 周佳 孙秀文 闫涛 阮本帅 GAO Liheng;YU Qian;ZHOU Tianfeng;ZHOU Jia;SUN Xiuwen;YAN Tao;RUAN Benshuai(School of Mechanical Engineering,Beijing Institute of Technology,Beijing 100081,China;Jiangxi Phenix Optical Technology Co.,Ltd.,Shangrao 334000,China;Suzhou Institute of Nano-Tech and Nano-Bionics,Chinese Academy of Sciences,Suzhou 215123,China;Cheerful Micro-Nano Technology(Ningbo)Co.Ltd.,Ningbo 315500,China)

机构地区：[1]北京理工大学机械与车辆学院,北京100081 [2]江西凤凰光学科技有限公司,江西上饶334000 [3]中国科学院苏州纳米技术与纳米仿生研究所,江苏苏州215123 [4]超丰微纳科技(宁波)有限公司,浙江宁波315500

出　　处：《光学精密工程》2025年第1期75-83,共9页Optics and Precision Engineering

基　　金：国家自然科学基金青年项目(No.52205440);江西省重大科技研发专项“揭榜挂帅”(No.20213AAE02003)。

摘　　要：为了提高光纤阵列准直用非球面微透镜阵列的加工精度和加工效率,深入研究了非球面微透镜阵列模具加工精度控制和面形误差补偿方法和理论。根据非球面微透镜阵列设计的光学几何结构特点,提出局部螺旋金刚石铣削方法,对磷化镍合金模具材料进行加工;针对模具材料和玻璃材料的高温特性及工艺参数会产生面形误差的问题,提出了非球面微透镜阵列模具补偿方法;通过模具轮廓补偿设计提高模压成形精度,提升光学性能,实现了10×10非球面微透镜阵列的高精度制造。实验结果表明:非球面微透镜阵列的面形误差PV控制在220~380 nm,表面粗糙度Ra可达7~10 nm。该方法为非球面微透镜阵列的高精度高效率批量制造提供了有效技术路径。This study explores the application of precision glass molding(PGM)technology to enhance the machining accuracy and efficiency of aspherical microlens arrays(AMLA)for fiber array collimation.The research focuses on the control of mold machining accuracy and the implementation of a compensation approach to address form errors in AMLA fabrication.A localized spiral diamond milling method is intro-duced for machining nickel-phosphorus mold materials,tailored to the structural characteristics and strin-gent precision requirements of AMLA.Furthermore,a form error compensation method is developed,considering the high-temperature properties of mold and glass materials as well as process parameters af-fecting accuracy.By optimizing the mold profile through compensation design,the precision of PGM is significantly improved,achieving the high-accuracy fabrication of a 10×10 AMLA.The proposed process controls the form error peak-to-valley(PV)within 220-380 nm and achieves a surface roughness(Ra)of 7-10 nm,thereby enhancing optical performance.This work provides a viable and efficient technical frame-work for the high-precision,large-scale production of AMLA.

关 键 词：超精密加工 螺旋金刚石铣削 非球面微透镜阵列 玻璃模压成形 面形误差 

分 类 号：TG506.1[金属学及工艺—金属切削加工及机床] TH161.5[机械工程—机械制造及自动化]