基于多层Ge_(2)Sb_(2)Te_(5)的光学调制器  

Optical Modulator Based on Multilayer Ge_(2)Sb_(2)Te_(5)

作　　者：冯若男 汪剑波[1,2] 邵铭 程相正 FENG Ruonan;WANG Jianbo;SHAO Ming;CHENG Xiangzheng(School of Physics,Changchun University of Science and Technology,Changchun 130022;Jilin Province Zhengzheng Inspection Co.,Ltd.,Changchun,130117;Electro-Optical Countermeasures Test&Evaluation Technology,Luoyang Electronic Equipment Test Center of China Key Laboratory,Luoyang 471003)

机构地区：[1]长春理工大学物理学院,长春130022 [2]吉林省正真检测有限公司,长春130117 [3]中国洛阳电子装备试验中心光电对抗测试评估技术重点实验室,洛阳471003

出　　处：《长春理工大学学报(自然科学版)》2025年第1期1-9,共9页Journal of Changchun University of Science and Technology(Natural Science Edition)

基　　金：吉林省教育厅科学研究项目(JJKH20220724KJ);吉林省科技厅科技发展计划项目(20240402068GH)。

摘　　要：随着光学调制器的快速发展,对具有可调光学性能的材料需求日益增多。为实现对光的精确调控,将Ge_(2)Sb_(2)Te_(5)(GST)与超表面结合来得到一种光学调制器。GST是一种光学性质随温度变化的相变材料,在非晶态(a-GST)、立方态(c-GST)、六方态(h-GST)的光学性质存在显著变化。采用射频溅射法制备GST薄膜,通过快速退火与X射线衍射仪(XRD)分析得到GST相变特性,并通过包络线法得到GST介电常数。将GST与超表面结合,通过仿真设计、优化多层结构模型,得到红外波段光学调制器。在2000~2500 nm波长范围内,该结构可对光进行阶梯式调控。经过计算得到,25℃下透射率平均值为94.91%,160℃下透射率平均值26.79%,220℃下透射率平均值0.09%。并且GST薄膜处于c-GST时调制深度(MD)在17.86%~96.73%范围内变化,GST薄膜处于h-GST时MD均高于99.70%。本研究不仅深化了对GST材料光学特性的理解,还为开发具有宽波长范围和高响应速度的光学调制器件奠定了基础,为多可重构光学系统提供了重要参考。The demand for materials with tunable optical properties is increasing with the rapid development of optical modulators.In order to achieve accurate control of light,an optical modulator was obtained by combining Ge_(2)Sb_(2)Te_(5)(GST)and metasurface.GST is a kind of phase change materials whose optical properties change with temperature,and the optical properties of the amorphous(a-GST),cubic(c-GST),and hexagonal(h-GST)states change significantly.In this paper,GST films were prepared by RF sputtering method.The phase transition characteristics of GST were obtained by rapid annealing and X-ray diffractometer(XRD),and the dielectric constant of GST was obtained by envelope method.The infrared optical modulator which combines GST and metasurface which is obtained by simulation design and optimization of a multi-layer structure model.The structure can be stepped to control the light in the wavelength range of 2000~2500 nm.The calculated results show that the average transmittance is 94.91%at 25℃,26.79%at 160℃,and 0.09%at 220℃.The modulation depth(MD)ranges from 17.86%~96.73%when GST films are in c-GST,and the MD is higher than 99.70%when GST films are in h-GST.This study not only deeps the understanding of optical properties of GST,but also lays a foundation for the development of optical modulators with wide wavelength range and high response speed,and provides an important reference for multi-reconfigurable optical systems.

关 键 词：Ge_(2)Sb_(2)Te_(5) 相变 调制器 可调 

分 类 号：O59[理学—应用物理]