A flexible-robust MOF for efficient purification of perfluoropropane  

作　　者：Lixian Cai Yingxiang Ye 

机构地区：[1]Fujian Provincial Key Laboratory of Polymer Materials,College of Chemistry and Materials Science,Fujian Normal University,Fuzhou,350117,China

出　　处：《Chinese Journal of Structural Chemistry》2024年第11期6-7,共2页结构化学(英文)

基　　金：supported by the National Natural Science Foundation of China(22301039).

摘　　要：Electronic specialty gases play a vital role in the semiconductor smart manufacturing industry,with a global market of more than$6 billion per year.Octafluoropropane(C_(3)F_(8)),as one of the perfluorocarbon electronic specialty gases,is widely used as a plasma etching and cleaning gas for semiconductor fabrication.

关 键 词：GASES perfluoro SMART 

分 类 号：F42[经济管理—产业经济]