Research on Stress Isolation and Precision Enhancement of Resonant Pressure Sensor  

作　　者：Qingtao Mu Kai Shi Xiaofeng Chen Fan Zhao Yulu Han Hua Liu Jianbing Xie 

机构地区：[1]MOE Key Laboratory of Micro and Nano Systems for Aerospace,School of Mechanical Engineering,Northwestern Polytechnical University,Xi'an 710072,Shaanxi 710000,China [2]MEMS Division,Shaanxi Huayan Aviation Instrument Company,Xi'an,Shaanxi 710000,China

出　　处：《Instrumentation》2024年第4期44-52,共9页仪器仪表学报(英文版)

摘　　要：Silicon resonant pressure sensors are widely used in aerospace and industry due to their high accuracy,good linearity,and long-term stability.Due to the stress and signal processing limitation,its accuracy is difficult to meet the application requirements,and we can only search methods to approach this continuously.This research introduces a stress-isolated structure and a processing method of frequency signal to enhance the index.The stress-isolated structure separates the press-sensor from the printed circuit board by nested bonding for plates with silica gel.It minimizes the transmitted stress but no affect on the electrical connection.The analysis algorithm of frequency based on a given waveform number instead of a given time improves the analytical accuracy of frequency and pressure.By redesigning the interrupt timing control strategy in Microcontroller unit,it addresses sudden jumps of frequency signal.The proposed technique compared to similar schemes,tested on a resonant pressure sensor at a temperature condition of-45℃to 75℃and barometric condition of 3.5 kPa to 110 kPa,reduces the effect of stress effectively,and enhances to 0.01Hz in accuracy of frequency.More importantly there is no sudden jump in frequency signal.The pressure accuracy is increased by 3.5 times to 0.0145%after calibrating.Over-all,the advised method meets the requirement of high accuracy and promotes applications in the aerospace field.

关 键 词：resonant pressure sensor stress isolation frequency resolution pressure measurement 

分 类 号：TN9[电子电信—信息与通信工程]