液压放大式两自由度压电微动平台建模仿真与控制  

Modeling,Simulation and Control of Hydraulic Amplified Piezoelectric Micro-motion Platform with Two Degrees of Freedom

作　　者：许有熊[1] 庄广锋 朱松青[1] 陈星宇 XU Youxiong;ZHUANG Guangfeng;ZHU Songqing;CHEN Xingyu(School of Automation,Nanjing Institute of Technology,Nanjing Jiangsu 211167,China;Solareast Holdings Co.,Ltd.,Lianyungang Jiangsu 222042,China)

机构地区：[1]南京工程学院自动化学院,江苏南京211167 [2]日出东方控股股份有限公司,江苏连云港222042

出　　处：《机床与液压》2025年第4期199-204,共6页Machine Tool & Hydraulics

基　　金：江苏省研究生科研与实践创新计划(SJCX23_1190);国家自然科学基金面上项目(52375292)。

摘　　要：传统微动平台采用压电加柔性铰链的方式,存在柔性铰链刚度低、承受载荷小、易损坏等问题。针对此,将压电和液压放大技术的优点应用到微动平台上,提出一种液压放大式两自由度压电微动平台,建立其数学模型,分析其工作机制和性能特点。利用AMESim软件对液压放大机构进行结构性能仿真。结果表明:在腔体体积小、弹簧刚度小的情况下,液压放大机构的位移放大效果最好。搭建AMESim与MATLAB的联合仿真模型进行动态仿真。结果表明:所提液压放大式两自由度压电微动平台能实现高精度定位,为后续的实际应用奠定了基础。最后通过实验验证了仿真结果的准确性。The traditional micro-motion platform adopts piezoelectric and flexible hinge,which has some problems,such as low rigidity of flexible hinge,small load bearing and easy damage.Aiming at this,combining the advantages of piezoelectric and hydraulic amplification technology and applying it to micro-motion platform,a hydraulic amplification two degrees of freedom piezoelectric micro-motion platform was proposed,its mathematical model was established,and its working mechanism and performance characteristics were analyzed.AMESim software was used to simulate the structural performance of the hydraulic amplifier mechanism.The results show that the displacement amplification effect of the hydraulic amplification mechanism is the best in the case of small cavity volume and small spring stiffness.A joint simulation model of AMESim and MATLAB was built to conduct dynamic simulation.The results show that the proposed hydraulic amplifying two degrees of freedom piezoelectric micro-motion platform can realize high-precision positioning,which lays a foundation for the subsequent practical application.Finally,the accuracy of the simulation model was also verified through experiments.

关 键 词：微动平台 压电 液压放大 动态仿真 实验研究 

分 类 号：TH137[机械工程—机械制造及自动化]