基于动态分岔的谐振式力传感器检测机理研究  

Research on detection mechanism of resonant force sensor based on dynamic bifurcation

作　　者：王发光 杨威 刘晨 李英蕊 李磊 WANG Faguang;YANG Wei;LIU Chen;LI Yingrui;LI Lei(College of Transportation and Vehicle Engineering,Shandong University of Technology,Zibo 255049,China)

机构地区：[1]山东理工大学交通与车辆工程学院,山东淄博255049

出　　处：《传感器与微系统》2025年第3期11-16,共6页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(11902182)。

摘　　要：提出了一种基于分岔特性的压电驱动力传感器设计方法并进行了实验验证。对谐振式力传感器进行了结构设计和理论建模,使用COMSOL有限元软件对不同载荷下力传感器的模态振型进行了仿真分析,实验分析了附加力对微谐振式力传感器分岔特性和幅频响应的影响。利用L型谐振结构的分岔行为实现了0.204~0.816 N微小附加力的定量检测。基于谐振式力传感器的分岔特性实验,提出了一种与微谐振器配合工作的可调阈值电压预警电路。搭建了检测电路和微谐振器的实物连接,验证了在一定附加力范围内,可调节阈值电压预警的微谐振式力传感器设计方案的可行性。A design method of piezoelectric driving force sensor based on bifurcation characteristics is proposed and verified by experiments.The structure design and theoretical modeling of the resonant force sensor are carried out.The modal shapes of the force sensor under different loads are simulated and analyzed using the finite element software,COMSOL.The influence of additional force on the bifurcation characteristics and amplitude-frequency response of the micro-resonant force sensor is analyzed experimentally.Using the bifurcation behavior of L-shaped resonant structure is used to realize quantitative detection of 0.204~0.816 N micro additional force.Based on the bifurcation characteristic experiment of the resonant force sensor,an early-warning circuit with adjustable threshold voltage co-operating with the micro-resonator is proposed.The detection circuit is physically connected with the micro-resonator,which verifies the feasibility of the designed scheme of the micro-resonant force sensor with adjustable threshold voltage warning within a certain range of additional force.

关 键 词：模态耦合振动 磁力扰动 分岔跳跃 压力传感器 可调电压阈值预警 电路仿真 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TN79[自动化与计算机技术—控制科学与工程]