基于微波传感器的铁磁共振测量系统研究  

Research of ferromagnetic resonance measurement system based on microwave sensor

作　　者：张瀚月 李世交 吕本坤 杨潇楠[1] 卫荣汉 ZHANG Hanyue;LI Shijiao;LBenkun;YANG Xiaonan;WEI Ronghan(School of Electrical and Information Engineering,Zhengzhou University,Zhengzhou 450001,China;School of Mechanics and Safety Engineering,Zhengzhou University,Zhengzhou 450001,China;Industrial Technology Research Institute,Zhengzhou University,Zhengzhou 450001,China)

机构地区：[1]郑州大学电气与信息工程学院,河南郑州450001 [2]郑州大学力学与安全工程学院,河南郑州450001 [3]郑州大学产业技术研究院,河南郑州450001

出　　处：《传感器与微系统》2025年第3期25-28,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(52171193);河南省科技攻关计划项目(232102311187);河南省高等学校重点科研项目(23A416002)。

摘　　要：用于铁磁共振(FMR)测量的常规技术受频率或传输损耗的限制,测量装置和数据处理方式较为复杂。为提高FMR测量系统的稳定性和便捷性,减少装置的微波损耗,设计了一种共面波导和开口谐振环相结合的微波传感器。该传感器在9 GHz频段范围内的传输系数S21均大于-10 dB。同时,基于网络分析仪并结合LabVIEW程序软件,提出定场扫频和定频扫场两种测试模式,实现对Ni_(81)Fe_(19)薄膜的FMR特性的快速测量。该研究对于提升磁性材料的FMR参数的测试效率具有积极意义。Conventional techniques for measuring ferromagnetic resonance(FMR)are limited by frequency or transmission loss,and the measuring equipment and data processing methods are relatively complex.To improve the stability and convenience of FMR measurement system,and reduce microwave loss of euipment,a microwave sensor combining coplanar waveguide(CPW)and split ring resonator(SRR)is designed.The transmission coefficient S21 of this sensor is greater than-10 dB within the frequency range of 9 GHz.At the same time,based on network analyzer and combining with LabVIEW software,two testing modes,including fixed magnetic field scanning frequency and fixed frequency scanning magnetic field,are proposed to achieve fast measurement of the FMR characteristics of Ni_(81)Fe_(19)films.This research has positive singnificance for enhancing the testing efficiency of FMR parameters of magnetic materials.

关 键 词：微波测量 铁磁共振 频率 传输损耗 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置] TM931[自动化与计算机技术—控制科学与工程]