纳米通道气体流动的实验研究  

Experimental study on gas flow in nanochannels

作　　者：豆帅威 张玉东 韩豪施 卫荣汉 DOU Shuaiwei;ZHANG Yudong;HAN Haoshi;WEI Ronghan(School of Mechanics and Safety Engineering,Zhengzhou University,Zhengzhou 450001,China;Engineering Technology Research Center of Henan Province for MEMS Manufacturing and Application,Zhengzhou 450001,China;Industrial Technology Research Institute,Zhengzhou University,Zhengzhou 450001,China)

机构地区：[1]郑州大学力学与安全工程学院,河南郑州450001 [2]河南省微机电系统制造与应用工程技术研究中心,河南郑州450001 [3]郑州大学产业技术研究院,河南郑州450001

出　　处：《传感器与微系统》2025年第3期54-57,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(12102397,52171193)。

摘　　要：微纳米尺度下气体的流动表现出很强的非连续性和非平衡性。认识微纳米尺度下气体的流动特性,对于微型气体传感器等的开发具有重要的指导意义。本文基于双罐系统结合定容法和真空技术,设计搭建了微纳米尺度气体流动测量装置,并对装置进行标定。基于该装置,对收敛型纳米通道内气体流动特性进行研究。结果表明,该装置得到的纳米通道内气体质量流率随着通道两端压力比的增大而线性增加,与动理学理论的结果具有一致性,但实验测量值显著高于理论值,说明采用漫反射边界的动理学理论结果低估了纳米通道内气体的质量流率。The flow of gas at the micro/nano scale shows strong discontinuity and non-equilibrium.Understanding the flow characteristics of gas at the micro/nano scale has important guiding significance for the development of micro gas sensors and other devices.Based on the two-tank system combined with the constant volume method and vacuum technology,a micro/nano scale gas flow measurement device is designed and built up,and the device is calibrated.Based on this device,the gas flow characteristics in convergent nanochannels are studied.The results show that the gas mass flow rate in the nanochannel obtained by the device increases linearly with the increase of the pressure ratio at both ends of the channel,which is consistent with the results of kinetic theory.However,the experimental measurement values are significantly higher than the theoretical values,indicating that the kinetic theory results using the diffuse reflection boundary underestimate the mass flow rate of the gas in the nanochannel.

关 键 词：微纳尺度流动 非连续流 双罐系统 定容法 真空技术 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] O354[自动化与计算机技术—控制科学与工程]