基于旋涂工艺的单层微结构电容式压力传感器  

Single layer microstructure capacitive pressure sensor based on spin coating process

作　　者：胡瑞明 HU Ruiming(Hebi Institute of Engineering and Technology,Henan Polytechnic University,Hebi 458030,China)

机构地区：[1]河南理工大学鹤壁工程技术学院,河南鹤壁458030

出　　处：《传感器与微系统》2025年第3期98-101,106,共5页Transducer and Microsystem Technologies

摘　　要：针对柔性电容式压力传感器进行了深入分析,结合传统制备方法的不足,设计了一种新型制备工艺,基于该方法制备得到了无微结构、单层以及双层微结构的三种传感器,并通过实验方法对三者的性能进行了对比分析,主要包括响应特性、迟滞特性以及灵敏度等。根据得到的结果可知,相对于其他两种类型的传感器,单层微结构传感器在性能上具有一定的优势,具备了较高的灵敏度,对于载荷分别为0~4 kPa,4~6 kPa和6~25 kPa的情况,对应的灵敏度分别为0.451 kPa^(-1),0.14 kPa^(-1)和0.03 kPa^(-1)。同时在可重复性以及响应速度等方面也具有一定的优势,具备了较强的性能,可用于对人体姿态变化进行有效地监测,适合于应用到可穿戴设备设计中。A deep analysis is conducted on flexible capacitive pressure sensors,and a new preparation process is designed based on the shortcomings of traditional preparation methods.Three types of sensors without microstructures,single-layer and double-layer microstructures are prepared based on this method.The performances of the three sensors are compared and analyzed through experimental methods,mainly including response characteristics,hysteresis characteristics,and sensitivity.According to the obtained results,it can be seen that compared to the other two types of sensors,single-layer microstructure sensors have certain advantages in performance and high sensitivity.For loads of 0~4 kPa,4~6 kPa,and 6~25 kPa,the corresponding sensitivities are 0.451 kPa^(-1),0.14 kPa^(-1),and 0.03 kPa^(-1),respectively.At the same time,it also has certain advantages in repeatability and response speed,with strong performance,which can be used to effectively monitor changes in human posture and is suitable for application in wearable device design.

关 键 词：电容传感器 柔性 微结构 灵敏度 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]