Highly dispersive multiplexed micromechanical device array for spatially resolved sensing and actuation  

作　　者：Leonardo Gregorat Marco Cautero Leonardo Vicarelli Dario Giuressi Alvise Bagolini Alessandro Tredicucci Giuseppe Cautero Alessandro Pitanti 

机构地区：[1]Department of Engineering and Architecture,Universitàdegli Studi di Trieste,Trieste,Italy [2]Department of Physics,Universitàdegli Studi di Trieste,Trieste,Italy [3]Department of Physics,Universitàdi Pisa,Pisa,Italy [4]Elettra Sincrotrone Trieste,Trieste,Italy [5]Center for Sensors and Devices,Fondazione Bruno Kessler,Trento,Italy [6]NEST Lab,CNR-Istituto di Nanoscienze and Scuola Normale Superiore,Pisa,Italy

出　　处：《Microsystems & Nanoengineering》2024年第6期279-286,共8页微系统与纳米工程(英文)

基　　金：financed through funding from ATTRACT,a European Union’s Horizon 2020 research and innovation project under grant agreement No.101004462.

摘　　要：The powerful resource of parallelizing simple devices for realizing and enhancing complex operations comes with the drawback of multiple connections for addressing and controlling the individual elements.Here we report on a technological platform where several mechanical resonators can be individually probed and electrically actuated by using dispersive multiplexing within a single electrical channel.We demonstrate room temperature control of the individual device vibrational motion and spatially-resolved readouts.As the single elements have proven to be excellent bolometers and individual nodes for reservoir computing,our platform can be directly employed for single-channel addressing of multiple devices,with immediate applications for far-infrared cameras,spatial light modulators and recurrent neural networks operating at room temperature.

关 键 词：spatially RESOLVED DISPERSIVE 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]