A microgripper based on electrothermal Al–SiO_(2) bimorphs  

作　　者：Hengzhang Yang Yao Lu Yingtao Ding Ziyue Zhang Anrun Ren Haopu Wang Xiaoyi Wang Jiafang Li Shuailong Zhang Huikai Xie 

机构地区：[1]School of Integrated Circuits and Electronics,Beijing Institute of Technology,Beijing,China [2]Engineering Research Center of Integrated Acousto-optoelectronic Microsystems,Ministry of Education of China,Beijing,China [3]Chongqing Institute of Microelectronics and Microsystems,Beijing Institute of Technology,Chongqing,China [4]School of Physics,Beijing Institute of Technology,Beijing,China [5]Zhengzhou Research Institute,Beijing Institute of Technology,Zhengzhou,China

出　　处：《Microsystems & Nanoengineering》2024年第6期449-460,共12页微系统与纳米工程(英文)

基　　金：supported by the National Key Research and Development Program of China(Nos.2023YFB3507300,2022YFA1207100,2023YFE0112400);National Natural Science Foundation of China(Nos.6231101499,62350710218,62204013,62102050,and 62074015);Beijing Natural Science Foundation(No.4242060,L246030);Open Research Fund of State Key Laboratory of Digital Medical Engineering(No.2023-K02);Henan Province Joint Fund Project(No.225200810102);Chongqing Municipal Distinguish Young Scholar Program(Grant No.2024NSCQ-JQX0192);Open Research Fund of Guangdong Provincial Key Laboratory of Advanced Biomaterials(Grant No.KLAB202404002).

摘　　要：Microgrippers are essential for assembly and manipulation at the micro-and nano-scales,facilitating important applications in microelectronics,MEMS,and biomedical engineering.To guarantee the safe handling of delicate materials and micro-objects,a microgripper needs to be designed to operate with exceptional precision,rapid response,user-friendly operation,strong reliability,and low power consumption.In this study,we develop an electrothermal actuated microgripper with Al-SiO_(2) bimorphs as the primary structural element.The fabricated microgripper naturally adopts a closed state due to process-induced residual stresses.The thermal expansion mismatch between Al and SiO_(2) allows for an easy transition of the microgripper between open and closed states by temperature control.Experimental data reveal that the microgripper can achieve impressive deformability,bending over 100 degrees at just 5 V,and responding within 10 ms.Its capability to handle micro-objects is verified using polymethyl methacrylate(PMMA)microbeads and its gripping strength is quantitatively assessed.It is demonstrated that the microgripper holding a microbead with a diameter of 400μm and a weight of 0.1 mg can withstand an average acceleration of 35 g during vibration test and over 1600 g in impact tests,highlighting its exceptional grasping performance.Additionally,the“pick-and-place”task for handling and positioning solder beads(0.25 mg for each bead)with diameters of 400μm on a bulk silicon inductor chip has been successfully completed.This unique microgripper is anticipated to be highly beneficial for various micro-assembly and micromanipulation applications,particularly in the field of electronic packaging.

关 键 词：exceptional BENDING GUARANTEE 

分 类 号：O63[理学—高分子化学]