气浮导轨支承的静态特性分析及优化设计  

Analysis and Optimization of Static Characteristics of Air-bearing Guideway

作　　者：王钒宇 黄善胜 夏辉衡 李景潼 WANG Fanyu;HUANG Shansheng;XIA Huiheng;LI Jingtong(Ji Hua Laboratory,Foshan Guangdong 528000,China)

机构地区：[1]季华实验室,广东佛山528000

出　　处：《润滑与密封》2025年第3期171-179,共9页Lubrication Engineering

摘　　要：为提升气浮导轨支承的静态特性,对气浮单元的关键参数进行优化分析及实验验证。基于气浮导轨支承气膜流场的理论模型及控制方程,利用ANSYS Fluent软件,研究节流孔直径、输入压力、气腔深度、节流孔深度及双边气膜厚度等关键参数对多孔耦合气流域静承载力、静刚度的影响。结果表明:节流孔深度对单边气流域的静态性能几乎没有影响;输入压力和气腔深度与单边气流域承载性能均呈正相关,但过大的输入压力和气腔深度均会导致导轨的稳定性下降;节流孔直径对单边气流域影响较大,适当减小节流孔直径可以提高承载能力,但会造成整体静态刚度下降。结合实际工况需求和工艺能力,确定节流孔直径0.16 mm、输入压力0.5 MPa、气腔深度0.05 mm、节流孔深度0.5 mm及双边气膜厚度24μm为气浮单元的优化设计值,并以此设计某超精密金刚石车床气浮导轨支承,其静承载力大于6000 N,静态刚度大于800 N/μm。To improve the static characteristics of air-bearing guideway,the optimization analysis and experimental verification were conducted on the key parameters of the air-bearing unit.Based on the theoretical model and control equation of the air-film flow field in air-bearing guideway,the influences of the key parameters such as the orifice diameter,the input pressure,the air-cavity depth,the orifice depth,and the bilateral air-film thickness on the static load capacity and static stiffness of the air-film with porous coupling were studied by using ANSYS Fluent software.It is found that the orifice depth has little effect on the static performance of the unilateral air-film.The input pressure and cavity depth are positively correlated with the bearing capacity of unilateral air-film,but excessive input pressure and cavity depth will lead to the decline of the stability of the guideway.The orifice diameter has a great impact on the unilateral air-film.Appropriately reducing the orifice diameter can improve the bearing capacity,but it will reduce the overall static stiffness.Combining with the actual conditions and process capabilities,the optimized design values of the air-bearing unit are determined as the orifice-diameter of 0.16 mm,the input pressure of 0.5 MPa,the air-cavity depth of 0.05 mm,the orifice depth of 0.5 mm,and the bilateral air-film thickness of 24μm.Based on the optimized parameters,an ultra-precision diamond lathe air-bearing guideway support was designed,with the static load capacity of more than 6000 N and the static stiffness of more than 800 N/μm.

关 键 词：气浮导轨支承 静态特性 小孔节流 雷诺方程 高刚度 

分 类 号：TH113.3[机械工程—机械设计及理论]