基于微透镜阵列的可调谐成像及仿真研究  

Tunable Imaging and Simulation Based on Microlens Array

作　　者：顾志祥 曾露 裴峰 肖轶 李建权[1] 吴思竹[1,2,3] GU Zhixiang;ZENG Lu;PEI Feng;XIAO Yi;LI Jianquan;WU Sizhu(School of Instrument Science and Opto-electronic Engineering,Hefei University of Technology,Hefei 230009,China;Anhui Provincial Laboratory of Intelligent Interconnected Systems,Hefei University of Technology,Hefei 230009,China;Anhui Provincial Key Laboratory of Measurement Theory and Precision Instruments,Hefei University of Technology,Hefei 230009,China;School of Mechanical Engineering,Nantong Vocational University,Nantong 226000,China)

机构地区：[1]合肥工业大学仪器科学与光电工程学院,合肥230009 [2]合肥工业大学智能互联系统安徽省实验室,合肥230009 [3]合肥工业大学测量理论与精密仪器安徽省重点实验室,合肥230009 [4]南通职业大学机械工程学院,南通226000

出　　处：《光子学报》2025年第2期156-164,共9页Acta Photonica Sinica

基　　金：国家重点研发计划(No.2021YFF0502700);国家自然科学基金(Nos.62375073,52177137);南通市自然科学基金面上项目(Nos.JC22022042,JC2023061)。

摘　　要：结合湿法蚀刻工艺和飞秒激光直写加工技术,在石英玻璃上制备了微孔阵列模板。利用形状记忆聚合物对模板进行软光刻复制,制备出了200×200(30.0μm)的微透镜阵列,通过Zemax仿真软件对微透镜的焦距及分辨率进行模拟仿真,结果与实验数据高度一致。在特定的转变温度(130℃)下,形状记忆微透镜阵列可实现微透镜尺寸、轮廓及空间分布的高度可编程性,从而赋予其形态转变能力。形状记忆微透镜阵列能够在不同形态间自由切换,当微透镜阵列处于压平状态时,经过再次加热至转变温度,能迅速恢复为最初态,实现了微透镜阵列的实时可变形功能。所提出的调谐方法为微光学器件的移动运输和光学传感等应用提供了新的解决方案。Microlens arrays have become indispensable core components in advanced micro-optical systems due to their large field of view,low aberrations,and lightweight characteristics.In recent years,as research in micro-optics has deepened,the manufacturing technology for microlens arrays has also been continuously evolving,particularly with significant progress in producing microlens arrays with complex surface profiles.However,to achieve adjustable performance of microlens arrays in areas such as imaging,3D display,and optical sensing,we need to integrate more functional components into the microlens arrays,which often leads to increased system size and complexity.Therefore,the practical application of adjustable microlens array still faces many challenges.To address this,the use of smart materials such as shape memory polymers,hydrogels,and piezoelectric materials,driven by external stimuli,offers new approaches for the reconfigurability of microlens arrays.The experimental research process is generally divided into three parts:the preparation of the micro-hole array template,the fabrication of the SMP,and the soft lithography process.First,the femtosecond laser parameters are set to create a pit array on quartz glass.Next,the surface is subjected to wet etching with HF,causing the pits to gradually enlarge over time,resulting in the desired micro-hole array template.The preparation of SMP involves mixing epoxy resin and hardener in a 3∶1 ratio,followed by vacuum treatment in an electric vacuum drying oven.Finally,the SMP is evenly coated onto the micro-hole array template,heated at 65℃for three hours,and then peeled off from the quartz template to obtain the SMP-MLA.The MLA obtained through the above process shows clear and smooth edges,and can produce sharp imaging of objects.Initially,the MLA provides a clear image of the letter“T”.At the transition temperature(130℃),by mechanically flattening it,the MLA becomes flat,resulting in a sharp decrease in height.Due to the change in the shape of the MLA,clear im

关 键 词：微透镜阵列 飞秒激光 形状记忆聚合物 仿真 可调谐成像 

分 类 号：TN249[电子电信—物理电子学]