基于扩束与辅助测量的大口径红外材料光学均匀性高精度检测  

High Precision Testing of Optical Homogeneity of Large Aperture Infrared Materials Based on Beam Expansion and Auxiliary Measurement

作　　者：刘威剑 黄阳[1] 张生杰 宋俊儒[1] 张超[1] 冀翼 袁群[2] LIU Weijian;HUANG Yang;ZHANG Shengjie;SONG Junru;ZHANG Chao;JI Yi;YUAN Qun(Beijing Institute of Space Mechanics and Electricity,Beijing 100094,China;School of Electronic and Optical Engineering,Nanjing University of Science and Technology,Nanjing 210094,China)

机构地区：[1]北京空间机电研究所,北京100094 [2]南京理工大学电子工程与光电技术学院,南京210094

出　　处：《光子学报》2025年第2期199-208,共10页Acta Photonica Sinica

基　　金：国家重点研究发展计划(No.2021YFF0701300)。

摘　　要：提出了基于扩束与辅助测量的四步干涉法检测材料光学均匀性。通过小口径红外球面波干涉仪与平行光管组合形成口径Φ400 mm的扩束准直光路,用于大口径红外材料光学均匀性的检测。为了解决红外材料厚度随口径不断增大后,传统四步法测量材料后表面反射波前时条纹对比度太差导致无法测量的问题,提出了可见光干涉仪辅助检测样品后表面面形的方法,不增加测量次数的同时,实现材料光学均匀性的绝对测量。采用该方法对口径Φ400 mm,厚度70 mm的红外锗材料光学均匀性进行了检测,光学均匀性结果为8.89×10^(-5)。此外,对不同口径,不同厚度的硅材料和锗材料进行了光学均匀性检测,测量不确定度均优于3.4×10^(-5)。Infrared imaging systems have extensive applications in remote sensing,detection,and reconnaissance,with effective apertures increasingly trending towards larger sizes.The performance of infrared optical systems critically depends on high performance large-aperture infrared materials,particularly since the optical homogeneity of these materials typically ranges from 10^(-5)to 10^(-4).The optical homogeneity introduces additional aberrations in the optical systems,leading to an increase in wavefront errors and decrease in imaging quality.High-precision testing of the optical homogeneity of large-aperture infrared materials is essential for optimizing manufacturing processes and serves as a pivotal means for evaluating and compensating for impacts on the performance of infrared transmission optical systems.In response to the growing demand for precise optical homogeneity measurements,this paper employs an infrared interferometer equipped with a spherical standard mirror combined with a collimator to create a large-aperture infrared collimated wavefront.In order to solve the problem that the reflection wavefront of the material's back surface cannot be measured in the traditional four-step method due to the low contrast of the fringes with the increasing thickness of infrared materials,an auxiliary measurement with visible light interferometer is used to test the back surface of the sample,achieving absolute measurement of the material's optical homogeneity without increasing measurement.This method uses the TF of a visible light interferometer as the standard reflector in the testing system,and then uses the TF as the reference surface to measure the back surface maps of infrared materials.The measured wavefront results are analyzed using the proposed Eq.7 for absolute determination of optical homogeneity in large-aperture infrared materials.The theoretical analysis alongside the testing scheme is illustrated,encompassing four steps:the reflected wavefront of the sample's front surface,the transmitted wavefront,the

关 键 词：大口径红外材料 干涉检测 辅助测量 光学均匀性 测量不确定度 

分 类 号：V464[航空宇航科学与技术—航空宇航制造工程]