单光子雪崩二极管阵列与硅光芯片的混合集成(特邀)  

Hybrid Integration of Single-Photon Avalanche Diode Array and Silicon Photonic Chip(Invited)

作　　者：任晓松 范元滨 史衍丽 袁之良 黄翊东 张巍 Ren Xiaosong;Fan Yuanbin;Shi Yanli;Yuan Zhiliang;Huang Yidong;Zhang Wei(Department of Electronic Engineering,Beijing National Research Center for Information Science and Technology,Frontier Science Center for Quantum Information,Tsinghua University,Beijing 100084,China;Beijing Academy of Quantum Information Sciences,Beijing 100193,China;School of Physics and Astronomy,Yunnan University,Kunming 650091,Yunnan,China)

机构地区：[1]清华大学电子工程系,北京信息科学与技术国家研究中心,量子信息前沿科学中心,北京100084 [2]北京量子信息科学研究院,北京100193 [3]云南大学物理与天文学院,云南昆明650091

出　　处：《光学学报(网络版)》2024年第1期5-12,共8页Acta Optica Sinica(Online)

基　　金：国家重点研发计划(2023YFB2805400);国家自然科学基金(92365210);清华大学自主科研项目和清华-珠海华发建筑光电子联合研究院项目;云南省重大科技专项(202402AC080001);云南贵金属实验室科技计划项目(YPML-2022050220)

摘　　要：基于倒装焊技术,实现了4×1铟镓砷/铟磷(InGaAs/InP)单光子雪崩二极管(SPAD)阵列和硅光芯片的混合集成。对4×1 SPAD阵列中两个SPAD在10℃温度下同时进行测试,当偏置电压较低时,片上光子探测效率为5%~6%,对应的暗计数率分别为1.6×10^(-5)counts/gate和4.5×10^(-5)counts/gate。提高偏置电压后,片上光子探测效率可提升至10%以上。进一步地,利用集成的SPAD阵列和硅光片上分束器实现了弱相干态Hong-Ou-Mandel (HOM)干涉的测量,得到的HOM干涉条纹可视度为45.0%±1.2%,证明了硅光芯片光子操控功能和SPAD阵列多路单光子探测功能综合集成的有效性。这种混合集成为实现规模化的光量子信息系统提供了一种可能的解决方案。Based on flip-chip technology,we demonstrate hybrid integration of a 4×1 indium gallium arsenide/indium phosphide(InGaAs/InP)single-photon avalanche diode(SPAD)array and a silicon photonic chip.When testing two SPADs in the 4×1 SPADs array simultaneously at 10℃,we achieve on-chip photon detection efficiency of 5%‒6%under a low bias voltage,with dark count rates of 1.6×10^(-5) counts/gate and 4.5×10^(-5) counts/gate,respectively.Increasing the bias voltage,the on-chip photon detection efficiency can be further increased to more than 10%.Furthermore,using the integrated SPAD array and silicon photonic beam splitter,we realize the measurement of Hong‒Ou‒Mandel(HOM)interference for weak coherent states,achieving a HOM interference fringe visibility of 45.0%±1.2%.This demonstrates the effectiveness of hybrid integration of the photon manipulation on the silicon photonic chip and the multichannel single-photon detection of the integrated SPADs array.The hybrid integration provides a potential solution for achieving scalable photonic quantum information systems.

关 键 词：InGaAs/InP SPAD阵列 硅光芯片 混合集成 单光子探测器 HOM干涉 

分 类 号：TN256[电子电信—物理电子学]