MEMS微型线圈及其在磁敏传感器中的应用  

MEMS Micro-Coils and Their Applications in Magnetic Sensors

作　　者：杨真 陈靖元 张朕泽 祝梦娇 黄家宝 孙学成 雷冲[5] Yang Zhen;Chen Jingyuan;Zhang Zhenze;Zhu Mengjiao;Huang Jiabao;Sun Xuecheng;Lei Chong(School of Electronic and Information Engineering,Education Department of Guangxi Zhuang Autonomous Region,Guangxi Normal University,Guilin 541004,China;Guangxi Key Laboratory of Brain-Inspired Computing and Intelligent Chips,Education Department of Guangxi Zhuang Autonomous Region,Guangxi Normal University,Guilin 541004,China;Key Laboratory of Integrated Circuits and Microsystems(Guangxi Normal University),Education Department of Guangxi Zhuang Autonomous Region,Guangxi Normal University,Guilin 541004,China;Microelectronic Research&Development Center,School of Mechatronics Engineering and Automation,Shanghai University,Shanghai 200444,China;National Key Laboratory of Advanced Micro and Nano Manufacture Technology,Department of Micro-Nano Electronics,School of Electronic Information and Electrical Engineering,Shanghai Jiao Tong University,Shanghai 200240,China)

机构地区：[1]广西师范大学电子与信息工程学院,广西桂林541004 [2]广西师范大学广西类脑计算与智能芯片重点实验室,广西桂林541004 [3]广西师范大学广西高校集成电路与微系统重点实验室,广西桂林541004 [4]上海大学机电工程与自动化学院微电子研究与开发中心,上海200444 [5]上海交通大学电子信息与电气工程学院微纳电子系微米/纳米加工技术国家级重点实验室,上海200240

出　　处：《微纳电子技术》2025年第3期99-120,共22页Micronanoelectronic Technology

基　　金：广西自然科学基金面上项目(2023JJA170157);广西类脑计算与智能芯片重点实验室开放基金(BCIC-23-K8);广西师范大学研究生教育创新计划项目(JGY2023041);广西高校集成电路与微系统重点实验室开放基金(ICM-24-03)。

摘　　要：微电子机械系统(MEMS)微型线圈是磁敏传感器的重要元件,在磁传感技术领域发挥着重要作用。MEMS微型线圈在磁传感器中具有微小化、高集成度、高灵敏度、低功耗和低成本等优点,有助于提升磁传感器的性能。综述了MEMS微型线圈的优势、结构类型、传统制备工艺、新兴制备技术以及在磁敏传感器中的应用。重点介绍了MEMS微型线圈在巨磁阻抗效应传感器和磁通门传感器中的应用研究进展,并简述了其在其他磁传感领域的作用。最后对MEMS线圈的发展和应用前景进行了展望,为其设计和具体应用提供思路。Micro-coils based on micro-electromechanical system(MEMS)have become an important element of magnetic sensitive sensors and play an important role in the field of magnetic sensing technology.MEMS micro-coils have the advantages of miniaturisation,high integration,high sensitivity,low power consumption and low cost in magnetic sensors,which help to improve the performance of magnetic sensors.The advantages of MEMS micro-coils,types with different structure,traditional preparation processes,emerging fabrication technologies and related applications in magnetic sensitive sensors are reviewed.The research progresses of different types of MEMS micro-coils in giant magnetoimpedance sensor and fluxgate sensor are highlighted,and then its role in other magnetic sensing fields is briefly described.Finally,the development and application prospects of MEMS micro-coils are elaborated.This review provides ideas for understanding the specific applications and design requirements of MEMS micro-coils,and helps to optimise their performance and design MEMS micro-coils for specific needs and to meet the multifunctionality requirements of magnetoelectronic devices.

关 键 词：微电子机械系统(MEMS) 微型线圈 磁敏传感器 巨磁阻抗传感器 磁通门传感器 

分 类 号：TP211.5[自动化与计算机技术—检测技术与自动化装置] TP703[自动化与计算机技术—控制科学与工程]