改进型双光路测量法检测角锥棱镜直角误差  

Improved double-pass measurement method for detecting right-angle errors of corner cube prisms

作　　者：韩满林 韩森 吴泉英[1] 张凌华[2] 沈宇航 杨颖 郭敬铭[2] HAN Manlin;HAN Sen;WU Quanying;ZHANG Linghua;SHEN Yuhang;YANG Ying;GUO Jingming(School of Physical Science and Technology,Suzhou University of Science and Technology,Suzhou 215009,China;School of Optical-Electrical and Computer Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China;Suzhou H&L Instruments LLC,Suzhou 215123,China)

机构地区：[1]苏州科技大学物理科学与技术学院,江苏苏州215009 [2]上海理工大学光电信息与计算机工程学院,上海200093 [3]苏州慧利仪器有限责任公司,江苏苏州215123

出　　处：《应用光学》2025年第1期148-155,共8页Journal of Applied Optics

基　　金：国际等效高精度计量仪器和标准器研制(一期)国家重点研发项目(2022YFFO707700)。

摘　　要：传统的角锥棱镜二面角直角误差测量是基于斐索干涉系统使用单光程法对角锥进行直接测量,存在多次逆反射导致的系统像差以及调节参考镜倾斜引入的误差。采用一种改进型的双光程测法,可以匹配参考光和测试光的不规则性,进而消除系统像差的影响,且无需调整参考镜。实验使用斐索干涉仪,分别采用传统方法和改进型方法对同一角锥样品进行测量。单光程测量法得到二面角直角误差分别为0.9785μrad,1.5368μrad以及-0.3558μrad;双光程测量法得到二面角直角误差分别为0.6383μrad,1.2609μrad以及-0.3113μrad。实验结果验证了双光程测量法比单光程测量法更为准确。The traditional method for measuring the right-angle error of a corner cube prism involves using the Fizeau interferometric system with a single-pass method.However,this method has some limitations,including the presence of systematic aberrations caused by multiple retro-reflections and errors introduced by adjusting the tilt of the reference mirror.An improved double-pass method was used to measure the right-angle error of a corner cube prism.This method could match the irregularities of the reference light and the test light,which eliminated the effect of systematic aberration and eliminated the need to adjust the reference mirror.Experiments were carried out using a Fizeau interferometer to measure the same corner cube prism using the traditional method and the improved method.Single-pass measurements result in dihedral angle errors of 0.9785μrad,1.5368μrad,and−0.3558μrad,respectively.Double-pass measurements result in dihedral angle errors of 0.6383μrad,1.2609μrad,and−0.3113μrad.The experimental results verify that the doublepass measurement method is more accurate than the single-pass measurement method.

关 键 词：角锥棱镜 二面角直角误差 单光程测量 双光程测量 

分 类 号：TN206[电子电信—物理电子学]