含氮杂环有机添加剂对线圈电感表面沉积钴层微观结构及性能的影响  

Effect of nitrogen-heterocycle organic additiveson microstructure and properties of plating cobalt on surface of coil inductor

作　　者：宋进 李超谋 齐国栋 皮亦鸣 王城 何科翰 张东明 何为 陈苑明 Song Jin;Li Chaomou;Qi Guodong;Pi Yiming;Wang Cheng;He Kehan;Zhang Dongming;He Wei;Chen Yuanming(GCI Science&Technology(Zhuhai)Co.,Ltd.,Zhuhai 519175,China;School of Materials and Energy,University of Electronic Science and Technology of China,Chengdu 610054,China;Institute of Electronic and Information Engineering of UESTC in Guangdong,Dongguan 523808,China;School of Science,Xichang University,Xichang 615013,China)

机构地区：[1]珠海杰赛科技有限公司,广东珠海519175 [2]电子科技大学材料与能源学院,四川成都610054 [3]电子科技大学广东电子信息工程研究院,广东东莞523808 [4]西昌学院理学院,四川西昌615013

出　　处：《电镀与精饰》2025年第3期34-38,共5页Plating & Finishing

摘　　要：钴作为关键导体材料在集成电路中实现电路互连起着重要地位。本文采用量子化学计算、电化学测试和电沉积方法研究了咪唑、吡嗪、水杨醛肟3种含氮杂环的有机添加剂特性及其对电沉积钴的影响,采用扫描电子显微镜和接触角测试仪分析镀层形貌和表面润湿性。结果表明,3种含氮杂环有机添加剂通过在电极表面发生吸附对钴的电沉积起到抑制作用,其中吡嗪的抑制效果最强,单独使用3种含氮杂环有机添加剂的镀液体系下都未能获得致密平整的钴镀层。在铜线圈电感表面电沉积钴,可形成磁芯,有助于提升电感的电感值,在1 MHz时最高达到2.55μH。Cobalt as conductor material plays a significant role in realizing inter connection of integrated circuits.In this work,quantum chemistry calculation,electrochemical measurement and electrodeposition are employed to investigate the properties of nitrogen-heterocycle organic additives including imidazole,pyrazide and salicylaldoxime and their effects on electrochemical behavior in cobalt deposition.The morphology and surface wettability of deposits were analyzed by scanning electron microscope(SEM)and contact angle tester.The results showed that three kinds of nitrogen-heterocycle organic additives inhibited cobalt deposition via adsorption behavior on the electrode surface and pyrazide exhibited the best performance of inhibition,but dense and smooth deposits could not be obtained in the bath system with three additives alone.The formed magnetic cores of copper coil inductor leaded to remarkable performance improvements in the inductance value and the maximum reached 2.55μH at 1 MHz.

关 键 词：电沉积钴 微观形貌 含氮杂环有机添加剂 铜线圈电感 

分 类 号：TQ153.1[化学工程—电化学工业]