An optical carbon nanotube fibre probe for measurement of nano structures with large aspect ratio  

作　　者：Weihao Tao Shuhao Zhao Hanjin Dong Ze Zhang Peirui Ji Shenghan Qin Wenbo Hu Jinlong Zhu Renjie Zhou Shuming Yang 

机构地区：[1]State Key Laboratory for Manufacturing Systems Engineering,Xi’an Jiaotong University,Xi’an 710049,China [2]State Key Laboratory of Intelligent Manufacturing Equipment and Technology,Huazhong University of Science and Technology,Wuhan 430074,China [3]Department of Biomedical Engineering,The Chinese University of Hong Kong,Hong Kong,China

出　　处：《Nano Research》2025年第3期436-443,共8页纳米研究(英文版)

基　　金：support by the National Science Fund for Outstanding Young Scholars(No.52225507).

摘　　要：With the development of imaging and measurement technologies,scanning near-field optical microscopy(SNOM)has achieved high signal-to-noise ratio.The resolution of a fibre probe-based SNOM system is capable of reaching 10 nm.However,SNOM applications are presently constrained to the measurement of near-field optical information to relatively straightforward structures,including quantum dots,carbon nanotubes,graphene,and so forth.The geometry of conventional fibre probes,with tips at an angle of 30°-60°,presents a challenge for accurately imaging complex surface structures.This paper proposes a carbon nanotube composite fibre probe(CNT-FP)with a large aspect ratio.The key point is that a carbon nanotube bundle is composited at the tip of conventional surface plasmon polaritons fibre probes(SPPs-FP),which are the fibre probes coated with gold film to excite the SPPs.The coupling,propagation,and focusing effects of SPPs on the carbon nanotube bundle are verified.CNT-FPs have been fabricated and applied to measure a grating with the depth of 400 nm and the width of 400 nm.The experimental results show that the measurement accuracy and imaging quality of CNT-FP are nearly one order of magnitude higher than that of conventional SPPs-FP,as evidenced by evaluation criteria such as line roughness and volatility index.Moreover,it achieves an optical resolution of 72.1 nm in the measurements of a nano structure with large aspect ratio.It provides an effective solution of measuring structures with larger aspect ratios.

关 键 词：carbon nanotubes fibre optic probes surface plasmon polaritons nano-focusing large aspect ratio 

分 类 号：TB3[一般工业技术—材料科学与工程]