一种高测量稳定性的光电自准直仪系统设计  

A photoelectric autocollimator system design with high measurement stability

作　　者：肖倩 俞宪同 周军[1] 刘奎硅 陈继刚 XIAO Qian;YU Xiantong;ZHOU Jun;LIU Kuigui;CHEN Jigang(School of Optical-Electrical and Computer Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China;Shanghai Institute of Precision Metrology and Testing,Shanghai 200090,China)

机构地区：[1]上海理工大学光电信息与计算机工程学院,上海200093 [2]上海精密计量测试研究所,上海200090

出　　处：《光学仪器》2025年第1期72-78,共7页Optical Instruments

摘　　要：光电自准直仪在角度测量过程中存在光路依赖性强的特点,因而容易引起测量结果不稳定的情况。为解决上述问题,通过分析系统光路被部分遮挡对测量误差的影响,建立了自准直仪的角度误差数学模型。结合分析结果,通过优化分划板的几何参数来降低测量结果对光路的依赖性,并进一步优化自准直仪光学系统,以应对狭缝变窄后能量传输效率低造成的测量结果波动,同时提出双CCD采样的光路结构来改善由随机误差引起的数据波动或数据量太少造成虚假目标的情况。结果表明,所设计的自准直仪光学系统具有稳定性好、结构简单等优点,在62.5 lp/mm处各视场调制传递函数值均大于0.2,最大畸变值小于0.0052%,能量传输接近衍射极限,可为提高光电自准直仪的测量稳定性提供参考价值。The photoelectric autocollimator has the characteristic of strong optical path dependence in the angle measurement process,so it is easy to cause unstable measurement results.In order to solve the above problem,this paper analyzes the influence of the partial occlusion of the optical path of the system on the measurement error,and establishes a mathematical model of the angular error to test the autocollimator.Combined with the analysis results,the geometric parameters of the splitter were optimized to reduce the dependence of the measurement results on the optical path,and the optical system of the autocollimator was further optimized to deal with the fluctuation of the measurement results caused by the low energy transmission efficiency after the narrowing of the slit.At the same time,the optical path structure of double-CCD sampling is proposed to reduce the data fluctuation caused by random errors or the false target caused by too few data.The results show that the designed autocollimator optical system has the advantages of good stability and simple structure.The modulation transfer function value of each field at 62.5 lp/mm is higher than 0.2,the maximum distortion value is less than 0.0052%,and the energy transmission is close to the diffraction limit.It provides reference for improving the measurement stability of the photoelectric autocollimator.

关 键 词：双CCD自准直仪 测量稳定性 光学仿真 像质评价 

分 类 号：TN2[电子电信—物理电子学]