过渡金属含氧涂层的制备工艺及性能分析  

Preparation Process and Performance Analysis of Oxygen-containing Coating on Transition Metal

作　　者：马茹 钟武烨 金睿 任思琪 么斯雨 齐立君[1] MA Ru;ZHONG Wuye;JIN Rui;REN Siqi;YAO Siyu;QI Lijun(Department of Reactor Engineering Technology,China Institute of Atomic Energy,Beijing 102413,China)

机构地区：[1]中国原子能科学研究院反应堆工程技术研究所,北京102413

出　　处：《原子能科学技术》2025年第3期683-690,共8页Atomic Energy Science and Technology

摘　　要：为获得低功函数接收极材料,利用磁控溅射沉积技术在过渡金属Mo、Nb和Ni表面制备了多组含氧涂层。对涂层内氧含量的控制进行了计算分析,并利用扫描电镜和俄歇系统对涂层进行了测试表征,同时采用紫外光电子能谱法对涂层表面进行了功函数测试。结果表明:采用磁控溅射技术所制备的涂层氧含量均匀、光滑致密、结合强度较高;对同一金属,通过控制O2/Ar流量比能改变涂层内的氧含量;而对不同的金属,若要获得相同氧含量,则越易与氧反应,沉积过程中O2/Ar流量比取值越低;过渡金属表面的功函数值吸附氧后增加,吸附铯后降低,同时吸附氧和铯后,进一步降低;其中,Mo含氧涂层的吸铯功函数值降至约1.3 eV,Nb含氧涂层降至约1.4 eV,Ni含氧涂层降至1.6 eV。As candidate materials for the collector in thermionic energy converters(TECs),reducing the surface work function of transition metals can lower the barrier index between TEC electrodes,thereby improving their thermoelectric conversion efficiency and promoting the application of TEC in the fields of aerospace and deep space exploration.In order to obtain the coatings of transition metals with low work function,investigation into the preparation process of the oxygen-containing coatings on the surface of transition metals has been conducted,and the testing technique for surface work functions was also studied.The magnetron sputtering physical vapor deposition(MS-PVD)technology was used to acquire the oxygen-containing coatings on three transition metals,including Mo,Nb and Ni.The methods on how to control the oxygen content value inside the deposited coating were analyzed by calculating the standard Gibbs free energy variation of the reactions between transition metals and oxygen.And several sets of refractory metal oxygen-containing coatings with different oxygen contents were prepared.Then,the surface morphology of the prepared coatings was observed using field emission scanning electron microscopy,and the changes in element content along depth of the coatings were detected using a nano scanning Auger system.Meanwhile,the bonding strength between the deposited coating and the substrate was tested and evaluated using an automatic scratch tester for coating adhesion.Finally,surface work functions of transition metal substrates and their coatings were tested using ultraviolet photoelectron spectroscopy(UPS).The results show that the smooth and dense oxygen-containing coatings of transition metals with high bonding strength can be obtained by using MS-PVD technology,and the oxygen content with controllable sizes is evenly distributed along the coating thickness.After adsorption of oxygen on the surface of transition metals,the work function value slightly increases,while after adsorption of cesium,the work function

关 键 词：过渡金属 热离子转换器接收极 磁控溅射 含氧涂层 功函数 

分 类 号：TL349[核科学技术—核技术及应用]