Fabrication and application of SiNWs based PANI:MOx heterostructures for human respiratory monitoring  

作　　者：Muhammad Taha Sultan Anca Dumitru Elham Fakhri Rachel Brophy Snorri Thorgeir Ingvarsson Andrei Manolescu Halldor Gudfinur Svavarsson 

机构地区：[1]Reykjavik University,Department of Engineering,Menntavegur 1,101,Reykjavik,Iceland [2]University of Bucharest,Faculty of Physics,PO Box MG-11,077125,Magurele,Romania [3]University of Iceland,Saemundargata 2,102 Reykjavík,Iceland

出　　处：《Journal of Semiconductors》2025年第3期48-60,共13页半导体学报(英文版)

基　　金：supported by the Icelandic research fund,Grant No.239987-051;by Landsvirkjun-Energy Research Fund,Grant No.NYR-29-2024。

摘　　要：In this study,we investigate an innovative hybrid structure of silicon nanowires(SiNWs)coated with polyaniline(PANI):metal oxide(MO_(x))nanoparticles,i.e.,WO_(3)and TiO_(2),for respiratory sensing.To date,few attempts have been made to utilize such hybrid structures for that application.The Si NWs were fabricated using metal-assisted chemical etching(MACE),whereas PANI:MO_(x)was deposited using chemical oxidative polymerization.The structures were characterized using Raman spectroscopy,X-ray diffraction,and scanning electron microscopy.The sensing characteristics revealed that the hybrid sensor exhibited a considerably better response than pure Si NWs:MO_(x)and Si NWs:PANI.Such an enhancement in sensitivity is attributed to the formation of a p-n heterojunction between PANI and MO_(x),the wider conduction channel provided by PANI,increased porosity in SiNWs/PANI:WO_(3)hybrid structures,which creates active sites,increased oxygen vacancies,and the large surface area compared to that available in pure MO_(x)nanoparticles.Furthermore,less baseline drift and increased sensor stability were established for the SiNWs structure coated with PANI:WO_(3),as compared to PANI:TiO_(2).

关 键 词：SiNWs metal oxides sensor XRD Raman spectroscopy scanning electron micrscopy 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TP274[自动化与计算机技术—控制科学与工程] R318[医药卫生—生物医学工程]