无线无源声表面波传感器温度补偿方法  

Temperature compensation method for wireless passive surface acoustic wave sensor

作　　者：徐静宁 蔡飞达[2] 张勇斌[1] 卢铭瑞 王晗 XU Jingning;CAI Feida;ZHANG Yongbin;LU Mingrui;WANG Han(Institute of Machinery Manufacturing Technology,China Academy of Engineering Physics,Mianyang 621000,Sichuan Province,China;Institute of Acoustics,Chinese Academy of Sciences,Beijing 100190,China)

机构地区：[1]中国工程物理研究院机械制造工艺研究所,四川绵阳621000 [2]中国科学院声学研究所,北京100190

出　　处：《电子元件与材料》2025年第1期41-48,共8页Electronic Components And Materials

基　　金：中物院发展项目专题资助(K1357)。

摘　　要：针对密闭空间内部状态参数的长期监测,设计了一种基于声表面波(SAW)原理的无源无线应变传感器。为解决应变测量中温度干扰的问题,提出了一种基于最小二乘法的温度补偿方法。通过微扰理论和有限元分析,对传感器的应变系数和温频系数进行了仿真计算,并对应变系数与温度的关系进行了多项式拟合,建立了应变系数对温度的补偿公式。构建了SAW应变传感器测试系统,在30,36,50和60℃条件下,测得了0~1000με范围内的频率响应。基于实验数据,确定了温度对应变系数的影响系数。将实验得到的谐振器频率代入补偿模型计算得到应变值,在30~60℃范围内实现了应变测量误差从31.2%降低至3.9%。This study presented the design of a passive wireless strain sensor based on the principle of Surface Acoustic Waves(SAW)for long-term monitoring of state parameters in closed environments.To address the problems arising from temperature interference in strain measurements,a temperature compensation method using the least squares approach was proposed.By applying perturbation theory and finite element analysis,simulations and calculations were conducted to determine the strain coefficient and temperature-frequency coefficient of the sensor.Farthermore,polynomial fitting was applied to establish a compensation formula that relates the strain coefficient to temperature.A SAW strain sensor testing system was constructed,which can measure the frequency response in the 0-1000μεrange across various temperature conditions of 30,36,50,and 60℃.Utilizing the experimental data,the temperatures influence coefficient on the strain coefficient was identified.By substituting the experimentally derived resonator frequencies into the compensation model,the strain measurement error was effectively reduced from 31.2%to 3.9%within the temperature range of 30-60℃.

关 键 词：声表面波 应变传感器 应变灵敏度 温度补偿 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]