基于F-P腔的高灵敏光纤振动传感器  

Highly sensitive fiber optic vibration sensor based on Fabry-Perot cavity

作　　者：葛吉瑶 赵庆超 孙晓 张绪成 赵燕杰 GE Jiyao;ZHAO Qingchao;SUN Xiao;ZHANG Xucheng;ZHAO Yanjie(School of Science,Shandong Jianzhu University,Jinan,Shandong,250101,China;Laser Institute,Qilu University of Technology(Shandong Academy of Sciences),Jinan,Shandong 250100,China)

机构地区：[1]山东建筑大学理学院,山东济南250101 [2]齐鲁工业大学(山东省科学院)激光研究所,山东济南250100

出　　处：《光电子.激光》2025年第3期231-238,共8页Journal of Optoelectronics·Laser

基　　金：国家重点研发计划(2022YFB3207602);山东省自然科学基金面上项目(ZR2020MF109);山东省重点研发计划项目(公益类)(2019GSF111011);山东省重点研发计划(重大科技创新工程)项目(2020CXGC010204)资助项目。

摘　　要：本文基于F-P腔干涉理论与弹性膜片谐振系统,设计了一种新型光纤振动传感系统,从理论上分析了其振动传感原理,利用Solidworks构建了有限元模型,并对传感器进行了模态分析和谐振特性响应分析。采用多峰解调算法实现了对绝对腔长的实时采集,具有分辨率高,动态范围大的优点,能适应腔长变化较大的场合。通过实验研究了其在周期性频率变化下的动态响应特性,实验结果表明:传感器有效频率区间为5—200 Hz,谐振频率为260 Hz,5—20 Hz的低频段有平坦的幅频响应曲线,实验最低检测加速度为0.1 m/s^(2),传感器在0.1—10 m/s^(2)加速度下稳定工作,轴向灵敏度为8.19μm/g,加速度分辨率为1.5×10^(-5)g,可应用于对管道泄漏低频次声波的监测。In this paper,based on Fabry-Perot cavity interference theory and elastic diaphragm resonant system,a new fiber optic vibration sensing system is designed.Its vibration sensing principle is analyzed theoretically,and the finite element model is constructed by Solidworks.The modal analysis and vibration characteristic response analysis of the sensor are carried out.The multi-peak demodulation algorithm is used to realize the real-time acquisition of the absolute cavity length,which has the advantages of high resolution and large dynamic range,and can adapt to the situation that the cavity length varies greatly.The dynamic response characteristics under the periodic frequency change are investigated through experiments,and the experimental results show that:the effective frequency range of the sensor is 5—200 Hz,the resonant frequency is 260 Hz,the low frequency band of 5—20 Hz has a flat amplitude-frequency response curve,the lowest detection acceleration is 0.1 m/s^(2),the sensor works stably under 0.1—10 m/s^(2)acceleration,the axial sensitivity is 8.19μm/g,and the acceleration resolution is 1.5×10^(-5)g.It can be used to monitor the low frequency infrasonic wave of pipeline leakage.

关 键 词：光纤传感 F-P腔 振动传感器 次声波监测 

分 类 号：TN253[电子电信—物理电子学]