一种基于FIB的平面透射电镜样品高效制备技术  

A High-efficient Plan-view Transmission Electron Microscopy Sample Preparation Technique by Focus Ion Beams

作　　者：段北晨 吴海辰 张蕾 陈国新 柯培玲 DUAN Beichen;WU Haichen;ZHANG Lei;CHEN Guoxin;KE Peiling(Public Technology Center,Ningbo Institute of Materials Technology&Engineering,CAS,Ningbo 315201,Zhejiang,China)

机构地区：[1]中国科学院宁波材料技术与工程研究所公共技术中心,浙江宁波315201

出　　处：《实验室研究与探索》2025年第3期43-46,共4页Research and Exploration In Laboratory

摘　　要：为了解决聚焦离子束(FocusIonBeams,FIB)制备平面透射样品时面临的难度大、成功率低等问题,提出了一种倒立的立体等腰梯形状的透射样品薄片模型。该模型在不破坏透射样品薄区结构完整性的前提下,通过抬高薄片底部截断沟槽的位置并缩小其面积(减少54%),从而缩短了截取时间。这种技术不仅减轻了高能离子束对样品的损伤,还削弱了加工过程中产生地再沉积效应,显著提高了平面透射样品薄片的制备效率及成功率。此外,在减薄过程中,通过在薄片上表面定点沉积细棒状碳层来标记待测试薄膜的位置,确保目标试样能够完整地保留于透射区内,实现了可定位区域的精准减薄。这种基于FIB的技术适用于多种材料体系,特别是对二维薄膜材料的平面透射样品制备尤为有效。Plan-view transmission electron microscopy(TEM)sample prepared by FIB is difficult and the success rate is low.To overcome difficulties,the lamella is milled to an inverted three-dimensional isosceles trapezoid.The aim is to reduce the connection area,shorten cut off time and lift-out lamella conveniently.Decreased connection area can not only reduce the damage from ion beam to lamella,but also weaken redeposition which filling up most of the trench.It improves the success rate and preparation efficiency of plan-view transmission electron microscopy sample without damaging the structural integrity of the thinning area.On the other hand,we propose an innovative idea about the thinning of lamella,a narrow C-protective layer deposits on the surface of lamella by high-precision focus ion beams as the marker to locate the sample of interest,this allows the desired materials to be reserved in the thin area.This technique can be applied to a wide range of material systems and is particularly suitable for two-dimensional film materials.

关 键 词：聚焦离子束 平面透射电子显微镜样品 精准定位 二维薄膜 

分 类 号：TB32[一般工业技术—材料科学与工程]