基于毫米波透射法的空间分辨等离子体参数测试方法研究  

Research on the Measuring Method of Space-Resolved Plasma Parameter Based on Millimeter-Wave Transmission Method

作　　者：郝泽宇 高天丰 陈飞宇 朱军锋 HAO Zeyu;GAO Tianfeng;CHEN Feiyu;ZHU Junfeng(Science and Technology on Electronic Test&Measurement Laboratory,The 41st Institute of China Electronic Technology Group Corporation,Qingdao 266555,China)

机构地区：[1]中国电子科技集团公司第四十一研究所电子测试技术重点实验室,山东青岛266555

出　　处：《电子质量》2025年第2期56-59,共4页Electronics Quality

基　　金：集团稳定支持经费项目(JTA2022WDZC202419);青岛市博士后资助项目(QDBSH20220201022);国家自然科学基金(62127804)资助。

摘　　要：等离子体参数的测定是发展先进制造工业关键技术所要解决的关键问题之一。目前,复杂应用场景下的等离子体参数测试普遍采用微波透射法,但其仅能获得测试路径内的平均等离子体电子密度,无法获得等离子体的空间分辨测试结果,难以满足实际工业生产需要。为了解决上述问题,设计了一种等离子体参数瞬态太赫兹波透射测试方法,将测试频率提高至毫米波频段,通过获得穿过等离子体的太赫兹波透射信号,能够反演等离子体电子密度的空间分布,实现空间分辨的等离子体参数测量。The determination of plasma parameters is one of the key problems to be solved in developing the key technology of advanced manufacturing industry.At present,microwave transmission method is generally used to test plasma parameters in complex application scenarios,but it can only obtain the average plasma electron density in the test path,and cannot obtain the test result of the spatial resolution of the plasma,which is difficult to meet the needs of actual industrial production.In order to solve the above problems,a transient terahertz wave transmission test method of plasma parameters is designed,and the test frequency is increased to the millimeter wave band.By obtaining the transmission signal of terahertz wave passing through the plasma,the spatial distribution of plasma electron density can be reversed,and the plasma parameters measurement with spatial resolution can be realized.

关 键 词：毫米波 等离子体 电子密度 空间分辨 

分 类 号：O536[理学—等离子体物理] TN015[理学—物理]