基于梁理论的静电薄膜驱动器仿真研究  

Simulation Study of Electrostatic Membrane Actuators Based on Beam Theory

作　　者：邱开鑫 李宝福[1] Qiu Kaixin

机构地区：[1]上海大学机电工程与自动化学院,上海200444

出　　处：《工业控制计算机》2025年第3期146-148,共3页Industrial Control Computer

摘　　要：采用梁理论推导了静电驱动器的弹性膜(梁)的本构方程,基于此理论建立了驱动器的二维仿真模型,通过仿真模型获得了电压、位移输出特性之间的关系,模拟了静电驱动器的工作过程,分析了驱动器的工作机理,为设计静电驱动器提供了比较理想的工具,并通过实验验证了理论模型的可靠性。研究结果表明,薄膜的弯曲刚度显著影响驱动器电极吸合处的变形和曲率变化;静电驱动器在电极未吸合阶段和电压饱和阶段的输出特性具有明显的非线性。The constitutive equations of the elastic membrane(beam)of an electrostatic actuator are derived using beam theory,and based on this theory,a two-dimensional simulation model of the actuator is established in this paper.The simulation model elucidated the relationships between voltage and displacement characteristics,and simulated the operational process of the electrostatic actuator.This analysis illuminates the working mechanism of the actuator,providing an ideal tool for designing electrostatic actuators,and the reliability of the theoretical model was validated through experimental verification.The research results indicate that the bending stiffness of the membrane significantly affects the deformation and curvature changes at the electrode contact points of the actuator.The output characteristics of the electrostatic actuator exhibit significant nonlinearity during the initial non-contact phase of the electrodes and the voltage saturation phase.

关 键 词：静电驱动器 曲梁模型 有限差分法 

分 类 号：TP3[自动化与计算机技术—计算机科学与技术]