基于改进型对数线性模型的高精度X射线测厚仪系统研究  

Research on high-precision X-ray thickness gauge system based on improved logarithmic linear model

作　　者：孙进[1] SUN Jin(Equipment Department,Baoshan Iron&Steel Co.,Ltd.,Shanghai 200941,China)

机构地区：[1]宝山钢铁股份有限公司设备部,上海200941

出　　处：《宝钢技术》2025年第1期45-49,共5页Baosteel Technology

摘　　要：提出了一种创新的改进型对数线性模型,通过对比不同模型的拟合精度,验证了其显著优于其他传统模型。基于该优选模型,成功研制出一套高精度X射线测厚仪系统,实现了对厚度标准样板的精确测量。试验结果表明:该系统具备极高的重复性精度,可达到±0.1%,同时相对测量误差优于±0.1%或±0.5μm,显著提升了测量精度和可靠性。研究成果不仅为X射线测厚技术的发展提供了新的思路和方法,也为工业生产中厚度测量的高精度需求提供了有力支持,具有重要的理论价值和实际应用意义。An innovative improved logarithmic linear model was proposed.By comparing the fitting accuracy of various models,it was verified that the model was significantly better than other traditional ones.Based on this optimized model,this study successfully developed a high-precision X-ray thickness gauge system to achieve accurate measurement of the thickness standard samples.Experimental results show that the system has extremely high repeatability accuracy,reaching±0.1%,and the relative measurement error is better than±0.1%or±0.5μm,which significantly improves measurement accuracy and reliability.The research results of this study not only provide new ideas and methods for the development of X-ray thickness measurement technology,but also provide strong support for the high-precision demand for thickness measurement in industrial production,which has important theoretical value and practical application significance.

关 键 词：X射线 测厚仪 厚度模型 

分 类 号：TP212.9[自动化与计算机技术—检测技术与自动化装置]