二硒化钛单晶透射电子显微镜样品制备及微结构研究  

A study on transmission electron microscopy specimen preparation and the microstructure of 1T-TiSe2 single crystal

作　　者：李俊[1] 姚奕辰 LI Jun;YAO Yichen(Institute of Physics,Chinese Academy of Sciences,Beijing 100190,China;Beijing No.4 High School,Beijing 100034,China)

机构地区：[1]中国科学院物理研究所,北京100190 [2]北京市第四中学,北京100034

出　　处：《新兴科学和技术趋势》2024年第3期266-273,共8页

基　　金：国家自然科学基金(12074408)。

摘　　要：本文结合二硒化钛(1T-TiSe_(2))单晶介绍一种可广泛应用于二维层状材料透射电镜样品制备的实验方法,可将厚度合适的单晶薄片转移至金属载网或原位电/热芯片上,具有操作简便、成功率高的特点。针对所制备的样品,使用高分辨透射电子成像、原子分辨扫描透射成像、原位变温电子衍射和输运测量、X射线色散能谱和电子能量损失谱等技术对材料的结晶质量和微观结构特性进行了系统的表征,结果表明材料本征性质在制备过程中得以保留。此外,对该方法的现存不足进行了讨论,对未来发展做出了展望,以期为相关科研工作提供参考。This article introduces an experimental method of preparing transmission electron microscopy(TEM)specimen of titanium diselenide(1T-TiSe_(2))single crystal,which can be extended to the twodimensional layered materials.Crystal flakes with electron-transparent thickness can thus be transferred onto either metal grids or in-situ electric/thermal chips,with the advantages of simple operation and wide adaptation.The prepared specimens were characterized by high-resolution transmission electron imaging,atomic-resolved scanning TEM,in-situ cryogenic electron diffraction and transport measurements,X-ray dispersive energy spectra,and electron energy loss spectra to systematically study the crystalline quality and microstructure features of the material.The results show that the intrinsic crystal properties are preserved during the preparation process.Additionally,the limitations and future prospects of this method are discussed,aiming to provide references for related research work.

关 键 词：二维材料 透射电子显微镜 样品制备 

分 类 号：O469[理学—凝聚态物理]