等厚离轴抛物面镜的超精密切削加工方法研究  

Research on ultra-precision machining method of off-axis parabolic mirror with equal thickness

作　　者：甘登鹏 邹喜聪 张向华 王俊杰 GAN Dengpeng;ZOU Xicong;ZHANG Xianghua;WANG Junjie(School of Mechanical Engineering,Jiangsu University of Technology,Changzhou 213001,China)

机构地区：[1]江苏理工学院机械工程学院,常州213001

出　　处：《现代制造工程》2025年第3期90-98,共9页Modern Manufacturing Engineering

基　　金：江苏理工学院科研基金项目(KYY22001)。

摘　　要：为了克服传统加工技术在加工等厚离轴抛物面镜时面临的大离轴量、大矢高差和面型精度较低的难题,提出了一种基于慢刀伺服技术的适用于大离轴量、大矢高差且加工精度较高的加工方法。该方法采用齐次坐标平移的策略,有效地解决了离轴抛物面存在的大离轴量问题;以一种新的角度坐标旋转法来确保离轴抛物面远、近轴端的矢高差接近为0,从而达到等厚的目的。此外,该研究还利用等角度-等弧长的离散法来离散刀触点,并对这些刀触点进行Z向刀具半径补偿,从而生成加工轨迹,使得加工精度更高。采用该研究提出的加工方法对RSA6061铝合金离轴抛物面工件(其口径为25.4 mm,曲率半径为50.8 mm,离轴角为90°)进行加工,成功加工出了面型精度RMS=0.124λ(λ=632.8 nm)、表面粗糙度Sa=1.952 nm的等厚离轴抛物面铝合金反射镜。该加工方法不仅使得加工过程变得更为简洁,而且有助于改善工件的加工质量。In order to overcome the problems of large off-axis amount,large vector height difference and low surface accuracy faced by traditional machining technology when machining the off-axis parabolic mirror with equal thickness,a machining method based on slow tool servo technology was proposed,which is applicable to large off-axis amount,large vector height difference and high machining accuracy.The method adopted the coordinate translation strategy,which effectively solved the problem of large off-axis amount existing in the off-axis paraboloid;a new angular coordinate rotation method was used to ensure that the vector height difference at the far and near axis ends of the off-axis paraboloid is close to 0,so as to achieve the goal of equal thickness.In ad-dition,the method of equal angle-equal arc length was used to discretize the contact points between the tool and the machined sur-face,and the tool radius compensation in Z direction was carried out for these contact points to generate the machining path,mak-ing the machining accuracy higher.RSA6061 aluminum alloy off-axis parabolic mirror parts(diameter of 25.4 mm,radius of cur-vature of 50.8 mm,off-axis angle of 90°)were processed by the processing method proposed.An equal thickness off-axis parabol-ic aluminum alloy mirror with surface accuracy of RMS of 0.124λ(λ=632.8 nm)and surface roughness of Sa of 1.952 nm has been successfully fabricated.The machining method not only makes the machining process more concise,but also helps to improve the machining quality of the workpiece.

关 键 词：超精密车削 等厚离轴抛物面 慢刀伺服 轨迹优化 

分 类 号：TH161.1[机械工程—机械制造及自动化]