热暴露温度对TiAlSiN梯度涂层性能的影响  

Effect of Heat Exposure Temperature on Performance of TiAlSiN Gradient Coatings

作　　者：吴雁 谷嘉伟 谢永乐 WU Yan;GU Jiawei;XIE Yongle(College of Mechanical Engineering,Shanghai Institute of Technology,Shanghai 200235,China;Shanghai Engineering Research Center of Physical Vapor Deposition(PVD)Superhard Coating and Equipment,Shanghai Institute of Technology,Shanghai 201418,China)

机构地区：[1]上海应用技术大学机械工程学院,上海200235 [2]上海应用技术大学上海物理气相沉积(PVD)超硬涂层及装备工程技术研究中心,上海201418

出　　处：《表面技术》2025年第6期108-114,共7页Surface Technology

摘　　要：目的探究不同热暴露温度对TiAlSiN梯度涂层表面微观结构及力学性能、结合强度、耐高温性能的影响规律及机制。方法采用阴极电弧离子镀制备了TiAlSiN梯度涂层,对涂层进行1h不同热暴露温度的加热,采用X射线衍射仪(XRD)、扫描电子显微镜(SEM)、纳米压痕仪等试验设备来研究热暴露温度对TiAlSiN梯度涂层表面微观结构、力学性能和结合强度的影响。结果TiAlSiN涂层在800℃下表面平整性良好,主要衍射峰基本不变,在900℃及以上时,涂层表面平整性变差,生成氧化物,力学性能大幅下降;TiAlSiN梯度涂层的硬度和结合强度均随温度的上升而下降,弹性模量随着温度上升先下降后上升然后再下降;TiAlSiN梯度涂层在高温环境下会生成Al_(2)O_(3)、TiO、TiO_(2)氧化膜,降低了O元素的扩散速度和活动能力,有效减缓了氧化速度。此外由于TiO_(2)氧化膜结构疏松多孔,一方面可以细化晶粒,另一方面也增加了Al和Ti等元素的扩散通道,使涂层可以在更短时间内形成更多致密氧化膜,从而提高TiAlSiN梯度涂层的耐高温性能。结论TiAlSiN梯度涂层使用温度可达800℃且高温耐久性较强,说明该梯度涂层是一种综合性能优异的防护性涂层。TiAlSiN coatings have attracted much attention due to their excellent performance and are widely used in industrial fields such as cutting tools and molds.However,there is still limited research on the performance of TiAlSiN coatings in the high-temperature field.In order to explore the performance of TiAlSiN coatings at high temperature more clearly,this paper designed TiSiN/TiAlSiN/TiAlN/TiN gradient coatings and prepared them using cathodic arc ion plating technology.The coatings were heated at different heat exposure temperature,and X-ray diffraction(XRD),scanning electron microscopy(SEM),nanoindentation tester,and Rockwell hardness tester testing equipment were used to characterize the effect of 1 hour of heat exposure at different temperature on the surface microstructure,mechanical properties,and bonding strength of TiAlSiN gradient coatings,and to elucidate the high-temperature resistance mechanism of TiAlSiN gradient coatings.Research found that TiAlSiN gradient coatings exhibited good surface smoothness after being exposed to high temperature of 600℃and 700℃for 1 hour,with a small amount of small droplets,pinholes,and shallow pits,as well as fewer cluster areas;After thermal exposure at 600℃,the phase composition and diffraction peak intensity remained almost unchanged.After thermal exposure at 700℃,a new WN phase was generated,leading to an increase in diffraction peak intensity.At 800℃,the surface smoothness was good,and the diffraction peak intensity was significantly reduced.At 900℃and above,the surface smoothness of the coatings deteriorated,and a large number of oxide particles formed on the coating surface,resulting in a significant decrease in mechanical properties.It was also found that the hardness and bonding strength of TiAlSiN gradient coatings decreased with increasing temperature,while the elastic modulus first decreased,then increased,and then decreased again with increasing temperature.Compared with the hardness and elastic modulus under no heat exposure,the decrease rate of

关 键 词：TiAlSiN梯度涂层 阴极电弧离子镀 热暴露温度 表面微观结构 力学性能 

分 类 号：TB34[一般工业技术—材料科学与工程]