椭圆偏振光谱在材料领域的应用进展  

Application progress of spectroscopic ellipsometry in materials

作　　者：李美汐 LI Mei-xi(SINOPEC(Beijing)Research Institute of Chemical Industry Co.,Ltd.,Yanshan Branch,National Engineering Research Center for Synthesis of Novel Rubber and Plastic Materials,Beijing 102500,China)

机构地区：[1]中石化(北京)化工研究院有限公司燕山分公司,橡塑新型材料合成国家工程研究中心,北京102500

出　　处：《精细与专用化学品》2025年第3期18-22,共5页Fine and Specialty Chemicals

摘　　要：椭圆偏振光谱(SE)以其非破坏性和非接触性、高精度和高灵敏度、原位测量能力以及广泛的适用性等技术优势,在材料科学、半导体物理、微电子学等领域发挥着重要作用。综述了近年来基于椭圆偏振光谱技术在材料科学领域的应用进展,主要包括半导体材料、聚合物材料以及生物传感材料。Spectroscopic ellipsometry(SE)boasts technical advantages such as non-destructiveness,non-contact nature,high precision and sensitivity,in-situ measurement capability,and broad applicability.Due to those advantages,this technology plays a significant role in fields including materials science,semiconductor physics,and microelectronics.The recent progress of SE in the field of materials science,primarily encompassing semiconductor materials,polymer materials,and biosensing materials was reviewed.

关 键 词：椭圆偏振光谱 半导体 聚合物 

分 类 号：O657[理学—分析化学]