聚焦离子束-扫描电子显微镜双束系统在合金钢夹杂物表征中的应用  

Application of focused ion beam-scanning electron microscopy double beam system in the characterization of inclusions in alloy steel

作　　者：鹿超超 孙雪娇 方金林 董丙成 吴红健 LU Chaochao;SUN Xuejiao;FANG Jinlin;DONG Bingcheng;WU Hongjian(Shandong Iron and Steel Group Co.,Ltd.,Ji'nan 271104,China)

机构地区：[1]山东钢铁股份有限公司,山东济南271104

出　　处：《冶金分析》2025年第2期10-17,共8页Metallurgical Analysis

摘　　要：在夹杂物控制研究中,如何准确表征和分析钢中夹杂物是关键环节。聚焦离子束(FIB)-扫描电子显微镜(SEM)可以对钢中夹杂物进行内部结构剖析、三维重构和透射电子显微镜(TEM)样品制备等,已成为合金钢夹杂物研究中的重要检测手段。本文重点讨论了FIB-SEM的工作原理及其在夹杂物内部结构剖析、三维重构、TEM样品制备方面的应用,通过检测低合金钢、高强钢、贝斯钢和轴承钢中夹杂物的结构、成分和分布,分析了镁铝尖晶石和硫化物的复合夹杂物、氮化物和硫化锰的复合夹杂物、钙铝酸盐和氮化钛的复合夹杂物等各种夹杂物的形成过程和原因。通过对轴承钢中夹杂物进行三维重构,获取了钢中(Ti, V)N固溶夹杂物的尺寸、三维形貌和空间分布等信息,并进行了TEM样品制备,为解决合金钢中夹杂物的溯源难题提供方法借鉴和理论参考。In the research of inclusions control,how to accurately characterize and analyze the inclusions in steel is the key link.Focused ion beam(FIB)-scanning electron microscopy(SEM)can realize the internal structure analysis and three-dimensional reconstruction of inclusions in steel as well as the sample preparation for transmission electron microscopy(TEM),so it has become an important detection method for the study of inclusions in alloy steel.In this paper,the working principle of FIB-SEM and its application in internal structure analysis,three-dimensional reconstruction of inclusions and TME sample preparation were discussed.By examining the structure,composition and distribution of inclusions in low alloy steel,high strength steel,bis steel and bearing steel,the formation process and reason of various inclusions such as magnesium aluminum spinel and sulfide complex inclusions,nitride and manganese sulfide complex inclusions,calcium aluminate and titanium nitride complex inclusions were analyzed.Through the three-dimensional reconstruction of inclusions in bearing steel,the size,three-dimensional morphology and spatial distribution of(Ti,V)N solid solution inclusions in steel were obtained.Moreover,the sample preparation for TEM was conducted.This paper provided method reference and theoretical reference for solving the problem of tracing the inclusions in alloy steel.

关 键 词：聚焦离子束-扫描电子显微镜(FIB-SEM) 夹杂物 结构剖析 三维重构 透射电子显微镜 样品制备 

分 类 号：TF76[冶金工程—钢铁冶金] TF701.3[金属学及工艺—物理冶金] TG115.21[金属学及工艺—金属学]