Structural engineering of vertically aligned nanocomposite films fabricated via magnetron and pulsed laser co-deposition for microwave application  

作　　者：Changliang Li Yong Sun Xiuhong Dai Yinglong Wang Taifu Feng Jianxin Guo Baoting Liu Xiaobing Yan 

机构地区：[1]Hebei Provincial Key Lab of Optoelectronic Information Materials,College of Physics Science and Technology,Hebei University,Baoding 071002,China [2]Key Laboratory of Brain-Like Neuromorphic Devices and Systems of Hebei Province College of Physics Science and Technology Hebei University,Baoding 071002,China [3]Department of Primary Education,Baoding Preschool Teachers College,Baoding 072750,China

出　　处：《Journal of Materials Science & Technology》2024年第30期94-101,共8页材料科学技术(英文版)

基　　金：supported by the NSFC(No.11374086)and the NSF of Hebei Province(No.E2014201188);the Post-graduate Innovation Fund Project of Hebei University(No.HBU2022bs009);the Project of Distinguished Young of Hebei Province(No.A2018201231).

摘　　要：Microwaves are often used in communication engineering,including in microwave relays as well as mul-tichannel,mobile,and satellite communications.To meet the demand for a“small,light,thin,and precise”modern electronic machine,developing highly tunable microwave materials to manufacture miniaturized microwave devices has become a top priority.Ferroelectric materials are excellent microwave materi-als,showing outstanding dielectric properties and tunability.Introducing low dielectric loss oxides in the construction of vertical self-assembly nanocomposites(VSNs)effectively improves their tunability and reduces dielectric loss.However,the optimal doping content of simple VSN films limits further improve-ment of tunability.Herein,we propose a strategy-gradient VSN to achieve combined improvement in tunability and dielectric constant by designing a sputtering and pulsed laser co-deposition.The resulting VSN composite film has a dielectric constant of 428.08,a dielectric loss of 0.0212,and a tunability of 78.69%.Our results contribute to the development of filters and have broad application prospects in the microwave industry.

关 键 词：1–3-type composite film Heteroepitaxial nanocomposite film DIELECTRIC 

分 类 号：TB3[一般工业技术—材料科学与工程]