高功率中红外量子级联激光器设计研究  

Research on Design of High Power Mid-infrared Quantum Cascade Laser

作　　者：常俊利 索华东 段凯[1] 朱国利[1] CHANG Jun-li;SUO Hua-dong;DUAN Kai;ZHU Guo-li(The 27th Research Institute of China Electronics Technology Group Corporation,Zhengzhou 450047,China)

机构地区：[1]中国电子科技集团公司第二十七研究所,郑州450047

出　　处：《电光系统》2024年第4期18-23,共6页Electronic and Electro-optical Systems

摘　　要：为了解决中红外波段半导体单靶条输出激光功率低,暂时无法在工业上大规模应用的问题,提出将4个半导体靶条激光模块进行空间合束,从而提高中红外波段量子级联激光器总的输出功率。针对4路激光在空间合束过程中遇到光束整形,合束后质量变差的问题,采用合适的镜片与微调光路等光束整形技术,提升整形、合束后的光束质量;在激光器工作过程中,会产生大量的热,导致温度升高,影响激光输出功率,通过驱动控制与控温模块,电流驱动控制电路和控温电路精确地对输入激光器的电流、温度进行实时控制,使量子级联激光器在室温下能够实现稳定的高功率输出。激光器各部分合理布局,实现光电一体小型化,质量轻,便携的优点易于被广泛应用。实验结果表明:依据文中设计方法研制的高功率中红外量子级联激光器具有室温输出功率高、较小发散角、窄线宽和宽带可调谐等特性,在工业领域具备广泛的应用前景。In order to solve the problem of low output power of mid-infrared semiconductor single-target laser modules at quantum cascade laser waveband,which cannot be massively applied to industry at present,a method of spatially combining four semiconductor target laser modules is proposed to improve total output power of the mid-infrared quantum cascade laser.In order to solve the problems of beam shaping and deterioration of beam quality after combining in the process of spatially combining the four lasers,several appropriate mirrors and beam shaping techniques are proposed.During the operation of the laser,large amounts of heat are generated,causing an increase in temperature and affecting laser output power.It can realize the real-time control of input current and temperature of the laser via drive control and temperature control module,so that the quantum cascade laser can achieve stable high-power output at room temperature.The rational layout of the laser's various parts achieves the advantages of compact size,light weight,and portability,making it easy to be widely used.The experimental results show that the high-power mid-infrared quantum cascade laser boasts high output power at room temperature,small divergence angle,narrow line width,and broadband tunability,has broad application prospects in industrial field.

关 键 词：中红外波段量子级联激光器 空间合束 光束整形技术 驱动控制与控温模块 

分 类 号：TN242[电子电信—物理电子学]