基于淘金优化算法的伺服电机系统滑模控制  

Optimization of Sliding Mode Control for Servo Motor Mechanism Based on Gold Rush Optimizer

作　　者：向导 张敏[2,3] 廖汉卿 王程 Xiang Dao;Zhang Min;Liao Hanqing;Wang Cheng(Beitaizhenhuan(Chongqing)Technology Co.,Ltd.,Chongqing 401329,China;National Engineering Laboratory for Big Data Analysis and Application,Peking University,Beijing 100871,China;Chongqing Research Institute of Big Data,Peking University,Chongqing 401329,China)

机构地区：[1]北太振寰(重庆)科技有限公司,重庆401329 [2]北京大学大数据分析与应用技术国家工程实验室,北京100871 [3]北京大学重庆大数据研究院,重庆401329

出　　处：《动力学与控制学报》2025年第1期86-93,共8页Journal of Dynamics and Control

基　　金：科技部国家重点研发计划资助项目(2023YFA1011500)。

摘　　要：本文研究基于淘金优化(Gold Rush Optimizer, GRO)算法的伺服电机系统的滑模控制(Sliding Mode Control, SMC)方法.随着半导体芯片制造工艺的持续进步,对封装设备的精度和性能提出更高要求.伺服电机系统作为关键组件,在半导体封装设备中扮演着重要角色.滑模控制方法因其强鲁棒性的优点被应用在多个领域,但其参数的手动调整给实际应用问题的研究带来了很大的不便.本文引入GRO算法来简化滑模控制方法的参数调整过程,提升伺服电机系统整体的性能.以音圈电机为例,运用状态空间模型来分析其动态特性,推导并设计滑模控制器,分析不同的参数选择对控制器性能的影响,并运用GRO算法对参数进行优化.实验结果表明,运用GRO算法进行参数优化后的滑模控制方法(GRO-SMC)响应速度快、稳定性高,能够迅速将伺服电机系统引导至预定的滑模面,且在预定的滑模面上系统状态的波动幅度明显减小.This paper investigates the sliding mode control(SMC)method for servo motor systems based on the gold rush optimizer(GRO).With the continuous progress of semiconductor chip manufacturing technology,higher requirements have been put forward for the accuracy and performance of packaging equipment.The servo motor mechanism plays an important role as a key component in semiconductor packaging equipment.SMC has been applied in multiple fields due to its strong robustness,but the manual adjustment of its parameters has brought great inconvenience to the research of practical application problems.This paper introduces the GRO to simplify the parameter adjustment process of SMC and improve the overall performance of servo motor system.Taking the voice coil motor as an example,the state space model is used to analyze its dynamic characteristics,and the sliding mode controller is derived and designed.The influence of different parameter choices on the controller performance is analyzed,and the GRO algorithm is used to optimize the parameters.The experimental results show that the sliding mode control method optimized by gold rush optimizer(GRO-SMC)has fast response speed and high stability.It can quickly guide the servo motor system to the predetermined sliding surface,and the fluctuation amplitude of the system state is significantly reduced on the predetermined sliding surface.

关 键 词：半导体芯片 伺服电机系统 状态空间模型 滑模控制方法 淘金优化算法 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]